Used ASML PAS 5500 / 250C #9265786 for sale

ASML PAS 5500 / 250C is a wafer stepper, a tool used in the semiconductor industry to manufacture microscopic electronic components on a silicon wafer. The equipment's technical specifications begin with its maximum field size, with a recent version offering a 250 mm-diameter light field. Additionally, its optics can be configured to support both cut-off scanners and step-and-repeat optics, with resolutions down to 0.3 microns. PAS 5500 / 250C stepper includes one or two full-floating flat table stages as well as a 7-axis motion control system. The flat table stages provide superior alignment and positioning accuracy for die-to-die processing, while the motion control unit allows for fast and precise X, Y and Z movements. The stepper's illumination machine features both a laser exposure tool and advanced i-Line optics. The laser exposure asset can be used to support both laser mask and direct laser writing (DLW) techniques, and features a 13.56 MHz 25 watt ArF (atomic fluorine) source and a 3 axis motion control model. The i-Line optics supports 0.6 and 0.8 micron operation, and is able to expose large wafer sizes in a short amount of time, with a maximum total substrate size of up to 8 inch. The optics offer the option to switch between scan and rectilinear modes with no mechanical changes to the optics. ASML PAS 5500 / 250C also includes a modular options structure with modules for in-situ metrology, contact alignment, and a pre-alignment module. The equipment also features a Windows-based platform for all setup, operation, and maintenance activities. This allows users to work with intuitive graphical user interfaces, along with integration tools dedicated for secondary automation. PAS 5500 / 250C is an advanced system designed to provide semiconductor companies with precision patterning and imaging capabilities for a variety of industrial processes. With its cutting-edge features and capabilities, the unit is capable of creating extremely precise components for various types of electronic devices.