Used ASML PAS 5500 / 300 #293817868 for sale

ASML PAS 5500 / 300 is a wafer stepper manufactured by ASML. It is a complete system capable of producing precision microcircuitry products on a single wafer in an automated and reliable process. ASML PAS 5500/300 consists of advanced motion delivery, stage, optics and control systems, allowing it to offer highly precise wafer processing capabilities. Its stage design, optimized for high-speed and high-accuracy, maintains stiffness and thermal stability to deliver precision placement accuracy at low vibration frequency and little thermal drift, providing stable results across multiple processing steps. PAS 5500 / 300 features a motorized precision stage for the highest level of in-plane placement accuracy and repeatability. This stage is driven by 3 independent and backlash-free linear motor systems and achieves both fast and accurate positioning. The optics and projection systems of PAS 5500/300 feature advanced resolution and repeatability, producing sharp profiles and high precision registration. It also has a wide wavelength range from ultraviolet through to far infrared light, providing compatibility with a variety of materials. ASML PAS 5500 / 300 also integrates advanced control systems for precise and reliable operation. This includes a precision controller and real-time, fully automatic measurement and feedback control system which allows for high repeatability over multiple procedures, even in complex processes. In conclusion, ASML PAS 5500/300 is a highly accurate wafer stepper capable of producing microcircuitry on a single wafer in an automated and reliable process. It features a precision stage, projection systems and a real-time control system to ensure high repeatability, accuracy and reliability over multiple procedures.