Used ASML PAS 5500 / 300B #9407670 for sale
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ID: 9407670
Wafer Size: 8"
Vintage: 1997
Stepper, 8"
Wavelength: 248 nm
Resolution: 150 nm
Overlay: 28 nm
Throughput: 88 WPH
Options included:
SECS
REFL_IMAGE_SENSOR
ARMS
SINGLE_RETICLE_SMIF
PEP_1_PRODUCTIVITY_UPGRADE
PEP_2_PRODUCTIVITY_UPGRADE
RETICLE_ERROR_COMPENSATION
FLATNESS_MODEL
LSQ_DISTO_MODEL
MARK_SENSOR KEY
BATCH_STREAMING
INTENSITY_2
AERIAL
FOCAL_ADJUSTMENT
EXTENDED_EXPOSURE
1997 vintage.
ASML PAS 5500 / 300B is an advanced wafer stepper used in semiconductor fabrication. It is a powerful and precise stepper which is configured to carry out a variety of tasks like photolithography processes and advanced defect inspection. It offers production speeds of up to 500 wafers an hour and can accommodate wafers up to 300 millimeters in size. PAS 5500 / 300B is equipped with an automated wafer handling equipment that ensures maximum utilization of space and speeds up the process. The stepper is also equipped with advanced feedback systems that enable it to optimize the dose and focus of each exposure for improved overlay performance. This stepper employs a high resolution projection optics system which utilizes phase shift masks for higher levels of resolution and speed. This unit is equipped with up to 4x reduction and has an accuracy of 147 nanometers. ASML PAS 5500 / 300B is capable of taking multiple exposures from a single set-up. This increases throughput and significantly reduces cost per wafer. It is also equipped with an active temperature control machine and an ambient light-checking tool that ensure ideal illumination conditions for each exposure. This stepper is also compatible with most popular design systems, such as CAD/CAM, SMD, and GDS software. This ensures fast and smooth data transfer and helps to reduce production time. PAS 5500 / 300B wafer stepper is an excellent choice for businesses seeking a high-performance, advanced stepper asset with superior accuracy and reliability. It is a powerful, flexible and cost-effective solution for a wide range of semiconductor fabrication applications.
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