Used ASML PAS 5500 / 400B #293817860 for sale

ASML PAS 5500 / 400B is an immersion stepper designed for semiconductor photolithography. It is the ideal choice for reliably producing highly accurate patterns on integrated circuit chips. The advanced optical and mechanical technology of this state-of-the-art machine makes it ideal for sub-micron and nanometer scale products. PAS 5500 / 400B offers a high performance, scan-type stepper with an air bearing stage. The scanner has a high-precision servo loop control and an enhanced HeNe laser autocollimator interferometer. The machine also offers advanced image evaluation programs, high accuracy, and superior alignment. It is capable of high throughput, quick space width (sidewall angle) generation, and provides good contrast in lamellar patterning applications. ASML PAS 5500 / 400B is capable of exposure programs ranging from those required for long exposure runs for prototyping to those that require short exposure times for high yield production and maximum throughput. It is also able to handle wafer sizes up to 8-inch diameter, and can process die sizes as small as 5 microns. The machine offers uniform and precise exposure performance across all field sizes. This crystal-flat optics provide for superior depth of focus across all field sizes while an autofocus system optimizes focus conditions during exposure. PAS 5500 / 400B is specifically designed for high precision and deep focus for highly complex integrated circuit patterns. It is the ideal choice for production of VLSI and memory chips, as well as biomedical substrates. In addition, it is ideal for flip chip applications and is also suitable for maskless fine line patterning. The machine offers maximum accuracy and repeatability, assuring precise patterning across multiple wafer runs. Its compact design also minimizes vibration while allowing high throughput rates. Peripheral controllers for vector data input and overlay calibration provide flexible operation during processing. In conclusion, ASML PAS 5500 / 400B is a robust and reliable wafer stepper that offers excellent performance for highly accurate patterning of integrated circuits. Its high precision scanning, superior pattern uniformity, and flexible operation make it the ideal choice for high precision lithographic production processes.