Used ASML PAS 5500 / 400C #293655011 for sale

ASML PAS 5500 / 400C is a wafer stepper developed by ASML (Applied Scanning Technologies) for the semiconductor industry. ASML PAS 5500 / 400 C is a step and repeat lithography tool designed for the production of multi-layer integrated circuits using deep ultraviolet illuminator. Its focal plane array (FPA) technology provide high image quality and high throughput rate. The machine is capable of scanning up to 1.2M glasses/min at a 65nm x 65nm domain size while maintaining a high resolution. PAS 5500 / 400C equipment comes with a built-in scan head and illuminator, as well as a Proximity Correction System (PCS) that provides high precision wafer alignment and traceable control. The built-in illuminator uses laser diode pumped Argon Fluoride (ArF) laser technology for 13.4nm wavelength exposure. It has an efficient multi-blanking source for high uniformity and peak brightness capabilities. PAS 5500 / 400 C uses a unique Hybrid Astigmatism sub-unit to reduce distortion and make possible a "Peak Precision Calibration". This reduces processor time and improves the fidelity of the scanned images. ASML PAS 5500 / 400C also offers competitive exposure time and high resolution through simultaneous use of several components, such as "Dual-Pass" and "Double-ArF" exposure technologies. ASML PAS 5500 / 400 C machine also has an advanced metrology capability with a high resolution 3D mapping option. It has the ability to measure features such as pattern placement accuracy, overlay accuracy and wafer overlay registration over its full range of wafer sizes. The tool comes with a standard library of process recipes. PAS 5500 / 400C is a versatile and efficient wafer stepper suited for the demanding requirements of the semiconductor industry. It offers high image quality, productivity and resolution, as well as metrology capability, making it ideal for integration in 24/7 batch production. It has an excellent cost-performance ratio and proven reliability and a long service life. PAS 5500 / 400 C wafer stepper is the perfect manufacturing solution for a wide range of products.