Used ASML PAS 5500 / 400D #9296950 for sale

ASML PAS 5500 / 400D is a highly technological wafer stepper, designed to work in extremely high volume and high throughput semiconductor chip production. This stepper, part of the PAS product family, is a state-of-the-art lithography equipment, featuring advanced technologies such as the latest ASML-designed PAS5m scanners, a 180nm resolution and a large 7nm depth of focus. The system is designed to ensure top performance at the maximum scanning speed of 15,000 wafers per hour, with a scan rate of 70nm per second. This maximizes throughput and can reduce cost per die. With the unit's minimal outgassing capabilities, it provides a clean, precise process with minimal defect generation. It is ideal for production of large logic chips, embedded circuitry and machine-on-chips. The in-linewidth capability is outstanding, boasting excellent feature-wise uniformity and repeatability. It also has integrated advanced surface metrology and sophisticated measurement features allowing for accurate pattern registration and superior overlay results. The model features two optical scanning stages each driven by a pair of linear motors, which are designed and operated to manufacture critical structures with repeatable accuracy. Also included in the tool are several advanced alignment and process control packages. This allows for a short cycle time and and maximum precision. ASML PAS 5500/400D can be tailored to many customer needs through a wide variety of options for model customization. This includes various choices for objective lenses, dry/wet cleaning operations and stage accuracy. To complete the lineup, the model is optimized for both EUV and traditional ArF light sources. PAS 5500 / 400 D is an impressively advanced stepper designed for high-volume, precisely accurate chip production. It meets or exceeds the expectations of semiconductor manufacturers who require superior performance and exceptional repeatability in a reliable microelectronics production modality.