Used ASML PAS 5500 / 60B #293817855 for sale
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ID: 293817855
i-Line stepper
Numerical Aperture (NA): 0.54
Resolution: 450 nm
DCO: 70
Throughput (WPH): 48.
ASML PAS 5500 / 60B is an optical imaging lithography equipment used in semiconductor chip production. This machine is a wafer stepper, which is a type of optical imaging device used in the manufacture of microelectronic devices. PAS 5500 / 60B is a state-of-the-art tool that is capable of taking electro-optical masks and transferring them onto moving silicon wafers. ASML PAS 5500 / 60B features advanced lithography, high-precision alignment, and extremely fast scanning capabilities for the production of high-yield chip designs. The wafer stepper has a high-performance, scan-ready reticle stage with auto-recognition and two-dimensional presentation of the reticle. It also has a high-accuracy alignment system, which enables high-accuracy image registration, and an auto-focus unit, which ensures that the optics stay properly focused during the imaging process. PAS 5500 / 60B is capable of producing chip designs with a feature size of down to 0.2 micrometers. It also has a high degree of process repeatability, which allows the production of chips with virtually identical characteristics. The machine also has a high-speed, burst-mode scanning machine, which ensures that chip images can be created quickly and accurately. ASML PAS 5500 / 60B has a wide range of input and output parameters, and can be connected to a variety of equipment to connect with other imaging systems, for example an Wafer Critical Dimension (CD) measurement instrument. The tool also has a two-layer overlay function, which enables the production of double-sided circuits without having to use double-sided masking. Despite being a relatively small machine, PAS 5500 / 60B still features all of the advanced features that are necessary for the production of high-quality chip designs. It is a reliable and cost-effective tool for the production of complex integrated circuits, making it an attractive choice for semiconductor chip manufacturing.
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