Used ASML PAS 5500 / 700 #293816709 for sale

ASML PAS 5500 / 700
Manufacturer
ASML
Model
PAS 5500 / 700
ID: 293816709
Photolithography system.
ASML PAS 5500 / 700 series wafer stepper is an automated machine used for precise lithographic imaging on silicon wafers in today's semiconductor industry. It uses optical lithography processes to expose patterns on the wafers to create micro circuits necessary for the manufacture of integrated circuits, silicon chips, and other semiconductors. One of the major features of this stepper is its high numerical aperture and exposure flexibility. Its NA or numerical aperture of 0.7 enables high resolution imaging and finer patterning. This is achieved by using a combined illuminator and mirror equipment, a combination that enables the use of various optical lenses to focus and magnify the exposure patterns. It further features an exposure field that can be customized to sizes of 4, 5, 6, and 8 inches. This wafer stepper is equipped with two objective lenses - an attenuated phase-shifting mask lens and a composite objective lens with a dual-zone illumination system. The attenuated phase-shifting mask lens uses ultraviolet light to make patterns on wafer surfaces, while the composite objective lens with dual-zone illumination unit amplifies these patterns while controlling aberration. This arrangement allows the stepper to provide enhanced performance in terms of pattern fidelity and imaging depth. Apart from its imaging performance, PAS 5500 / 700 series wafer stepper also features an advanced multi-axis motion control and tuning machine. This tool consists of a controller, encoders, and motor drivers that enable the stepper to deliver precise track movements and positionings. The stepper has an XY-stage for wafer movement and accurate positioning, and advanced voice coil sensors for fine incremental focusing. In terms of safety and reliability, this wafer stepper is equipped with several features such as a TEMIR beam stop and hose stop security asset, fan guards, fire control systems, temperature sensors, door magnets, and other safety devices. Finally, the stepper is CE certified and meets all safety regulations in terms of its design, performance, and industrial operations. Overall, ASML PAS 5500 / 700 series wafer stepper provides optimal lithographic imaging performance suitable for the most demanding semiconductor processes. Its high numerical aperture, exposure flexibility, and advanced motion control model, along with its safety and reliability features, make it an ideal choice for manufacturers of integrated circuits, silicon chips, and other semiconductors.
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