Used ASML PAS 5500 / 700 #9046362 for sale
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ID: 9046362
Wafer Size: 3"-8"
Stepper / scanner, 0.15um DUV, 3"-8"
Fully automated wafer handling system
2" with holders capable.
ASML PAS 5500 / 700 is an advanced wafer stepping equipment used to manufacture semiconductor components. Developed by specialized manufacturer ASML, the machine is designed to offer device makers an efficient and reliable means to accurately fabricate and test components. This tool utilizes state-of-the-art optics and electronics to provide the precision and capability that's needed to produce the highest quality semiconductor components. The system has a patented 5-axis motion design which includes a two-axis scanning stage, two-axis positioning stage and a direct drive motor. It allows for removal of non-critical elements, such as balance weights, from the motion stages, thus delivering a higher degree of accuracy and stability and improved operating speed. Additionally, the entire unit is mounted on an air bearings for improved stability and vibration damping characteristics. PAS 5500 / 700 incorporates a range of software and imaging capabilities, including enhanced 3D image analysis and processing, a high-performance automated lens calibration machine, and advanced defect analysis algorithms to ensure better quality control. It is further built with comprehensive safety features and monitoring capabilities that provide comprehensive data logging and review for in-depth, real-time process analysis. The tool also includes automatic process corrections to eliminate any external disturbances or impacts on the wafers. ASML PAS 5500 / 700 is a highly accurate instrument with user-friendly control functions. It offers integrated thermal control to keep the asset within a stable temperature range, allowing for precise optical and electronic performance. This model operates with complete self-monitoring of all its subsystems, including real-time back-action and upgrade capability. The real-time remote controls also offer operators extensive visualization, data collection and diagnostics tools for efficient monitoring and maintenance. The equipment utilizes technology to provide the best performance and yields for device manufacturers. With PAS 5500 / 700, semiconductor components manufacturers are assured of having a reliable, accurate and highly efficient system at their disposal.
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