Used ASML PAS 5500 / 700B #293779167 for sale

ASML PAS 5500 / 700B is a state-of-the-art wafer stepper used in photolithography. It is a scanning equipment with a commanding core that features accurate, continuous movement and long-term stability. Its main application is in the manufacture of semiconductor devices, wherein a pre-expanded wafer is transferred onto the stepper and precision alignment is achieved using lithographic exposures. The stepper is a fully automated computer-controlled imaging system. It contains a high-precision metal frame, called the wafer stage, which has both the X and Y axes of motion. The stage is motor driven and has the capability to move in 0.5- to 4.0-micron intervals. It also has the ability to measure its position with a precision of 0.1-micron size steps. Its linear encoder provides repeatable control over the movement of the stage. The wafer stage accommodates wafers up to 10" in diameter with a maximum of 45mm thick. The stepper can accommodate wafers with a thickness range within 7µm to 5mm. In addition to supporting wafers with different levels of flatness, the stepper contains a calibration unit that is capable of detecting shape errors and correcting exposed images. PAS 5500 / 700B is equipped with a high-power light source and a range of high-resolution lenses. It offers a range of exposures, including line/space and contact exposures, as well as high-aspect-ratio and complex shaped masking. Furthermore, its advanced optics setup and mirror machine allow for fine-tuning of photoresist focus and depth of field. The stepper is also equipped with a high-performance image analysis tool. It is capable of detecting defects and non-conformities in images to a level of 0.25µm. This allows for virtually perfect wafers with no defectivity. The robust, reliable, and reconfigurable design of ASML PAS 5500 / 700B allows for rapid, high-resolution stepper operation with a maximum operating speed of 35 exposures per second. Additionally, the stepper features a wide range of granularity, from full-field to partial-field exposures, providing greater flexibility in production applications. PAS 5500 / 700B is a powerful and versatile wafer stepper that provides reliable, high-resolution performances. It is a suitable tool for producing high-quality semiconductor devices. Its advanced optics, imaging asset, and automated operation allow for highly efficient and precise lithography.