Used ASML PAS 5500 / 750 #293812077 for sale

ASML PAS 5500 / 750 is a 5-megapixel scanning electron beam lithography (EBL) tool designed for semiconductor wafer processing. It is capable of exposing various chip geometries with resolutions as fine as 0.3 micron, at scanning speeds up to 50 nanometers per second. The lithography tool primary function is to create intricate sub-micrometer patterns on the surface of a wafer, allowing for the fabrication of more densely packed, higher performing integrated circuits. In order to do this, the wafer is mounted on an XY stage and passes through the beam which is descended from four linear stages. The electron beam is deflected by the magnet assembly, which is composed of a bipolar power supply, two independent coaxial coils, and two different sets of deflection coils. The power supply generates the electron beam, while the coils control the beam's size, shape, and movement. It is capable of producing very fine, intricate features, capable of satisfying modern semiconductor process demand. The electronics production environment is very clean to reduce the chance of contamination. The tool is set in a vacuum chamber, which provides an environment free of dust, gaseous contaminants, and particulates. The lithography system is also delivered with a high level of engineering to control its temperature and humidity. PAS 5500 / 750 is the perfect choice for those looking for a reliable and precise EBL solution. It is highly efficient and easy to use with intuitive software that makes the operating process straightforward. Its high degree of accuracy ensures the end results are of the highest quality and specification. The tool has many user friendly features such as a graphical job editor to simplify the wafer exposure process, a uniform beam scan function that eliminates non-uniform scanning effects, and a feature-rich user interface. It also comes with a suite of safety features to minimize the risk of accidental contamination of the wafer. This is an essential tool for those in the semiconductor industry, offering a reliable and cost-effective way to produce intricate patterns on the surface of a wafer. It is a great choice for anyone looking for a more precise lithography solution.