Used ASML PAS 5500 / 750E #293812100 for sale

ASML PAS 5500 / 750E is a high performance wafer stepper specifically designed to meet the needs and challenges of semiconductor production. It is a large immersion projection stepper optimized for extremely accurate, high-resolution photolithography and wafer overlay applications. The equipment is capable of producing high quality photosensitive die for the manufacture of high performance, high yield, and reliable semiconductor devices. PAS 5500 / 750E is comprised of an optical subsystem, a granite base, a two-axis translation stage, and a motor support. Its projection optics system consists of an infinity-corrected, achromatized high numerical-aperture, catadioptric objective lens with a maximum field of 1.2mm. The optical subsystem is also outfitted with a laser interferometer and a telecentric beam splitter. Additionally, the stepper is equipped with a 10X camera and a digital stepping stage with a 1.5mm pitch resolution. The granite base, which provides structural stability and vibration damping, is integral to the unit's inflexibly tight process control. The translation stage contains a feedback linear motor and is driven by a digital motion control machine with a 0.5µm repeatability and a 5µm orthogonal accuracy. The motor drive is controlled by an ASML electronics module and contains a real-time transformation circuit for accurately controlling the two axes of movement. The motor support has a maximum current handling capacity of 5.5A. The stepper's control tool is based on a Linux-type operating asset, and it is equipped with a wafer recognition model (WRS), programmable patterning levels, field shift, mask abuse protection, and second contact. The WRS identifies wafer size and thickness and adjusts the pattern generation settings accordingly. Overall, ASML PAS 5500 / 750E is an ideal solution for high-end photolithography applications because of its advanced optics, precision motion control, and other features that make it highly accurate, reliable and productive.