Used ASML PAS 5500 / 80 #9188719 for sale

ASML PAS 5500 / 80
Manufacturer
ASML
Model
PAS 5500 / 80
ID: 9188719
Vintage: 2003
i-Line stepper 2003 vintage.
ASML PAS 5500 / 80 focus assembly stepper is an advanced wafer stepper for semiconductor fabrication that offers manufacturers enhanced feature size resolution and accuracy. It is a high-speed, high-accuracy wafer processing unit that is compatible with various imaging elements such as wafers, masks, and substrates. This wafer stepper, often found in the production and development of integrated circuits, utilizes high resolution projection lithography to obtain images on silicon wafers with high speed and accuracy. The stepper uses a sophisticated air bearing equipment with sophisticated computer control, which allows it to quickly and accurately scan the desired pattern onto the wafer with great precision. The device is powered by a small maintenance-free motor and a cooling fan provides cooling air over the wafer during the processes. The device is equipped with a finely tuned light source and a high-resolution projection system complete with a five-axis stage. It utilizes advanced sensor technology to accurately measure the position of the wafer and monitor its position in all three directions. The stepper can also be utilized with OPC patterns to achieve smaller features and tighter control for precision feature sizes. Additional features include an automatic end stop and an integrated electrical isolation unit, plus a pulsed liquid crystal display for ease of operation. ASML PAS 5500/80 is capable of processing wafers of up to twenty-four inches in diameter, and can handle objects as heavy as up to 20 kilograms. It boasts an impressive maximum scan speed of up to 7500 steps per second and a minimum size resolution of 0.5 microns, allowing for intricate, minute detail on the processed surface. The stepper is designed to minimize particle contamination and offers complete cleanroom compatibility. Active vibration control, in tandem with efficient electrical architectures, also enhance the device's capabilities. It is engineered to minimize power consumption, while providing consistent, reliable performance over extended cycles. PAS5500 / 80 is an extremely powerful wafer stepper, providing manufacturers with the tooling and capability necessary for fabricating high-precision parts with extreme accuracy. Its light weight, compact size, and efficient design are all advantageous in an industrial environment. The machine is designed to enable high-quality production with minimum machine downtime, resulting in a cost-effective and reliable semiconductor production process.
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