Used ASML PAS 5500 / 90 #293817842 for sale

ASML PAS 5500 / 90
Manufacturer
ASML
Model
PAS 5500 / 90
ID: 293817842
Stepper Numerical Aperture (NA): 0.5 Resolution: 350 nm DCO:  70 Throughput (WPH): 60.
ASML PAS 5500 / 90 is an advanced laser-based wafer stepper system. This stepper acts as a photon-beam lithography tool, employing high-powered argon lasers to create nanoscale structures onto semiconductor wafers. It allows for the high-precision alignment and movement of objects (on a wafer) with a resolution of up to 0.7 microns. PAS 5500 / 90 is housed in a high-vacuum upright enclosure to allow for improved photon collection, and is made of robust materials that reduce vibration and maintain micro-level accuracy for optimal wafer performance. The stepper contains two primary components: a Scatter Beam Generator (SBG) and the Wafer Holding System (WHS). The SBG is situated at the base of the unit and projects a beam of electrons onto the surface of the wafer. The WHS, located at the top of the unit, is responsible for holding and precisely moving the wafer with motorized linear and circular movements, allowing for intricate patterns to be etched with laser beams. ASML PAS 5500 / 90 can be used to construct microscopic features and circuits such as logic circuits, MEMs, and transistors onto a wafer. It is capable of creating fine patterns of varying shapes, such as circles, squares, and polygons, with a minimum line width of 0.7 microns. The microphone arrays used in medical and hearing/speech technology applications can also be created using this machine. To ensure accuracy, the stepper employs an algorithm known as the Image Transformation Algorithm (ITA). This algorithm enables the stepper to accurately predict and create the desired pattern on the wafer with minimal exposure post-exposure calculation. With its superior accuracy, PAS 5500 / 90 can serve as a reliable tool for advanced nanotechnologies such as 3D printing. ASML PAS 5500 / 90 is designed for quick, easy setup and easy maintenance, minimizing downtime for users. It offers an intuitive user interface with touch-screen control, allowing operators to rapidly adjust settings and parameters as needed. Through its advanced features and robust design, PAS 5500 / 90 delivers exceptional performance in the manufacture of fine nanostructures and devices.
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