Used ASML Power box #293671352 for sale

ASML Power box is a type of wafer stepper used in the semiconductor process. It is an advanced tool designed to precisely position and expose semiconductor wafers to various types of radiation. The machine utilizes X, Y, and Z motors to move the stage and adjust the illumination parameters on the wafer. This allows for highly accurate lithography of small devices and high feature density. The basic parameters of Power box are as follows: imaging area - 300 mm; image size - 200 to 500 nm; illumination sources - UV, IR, and visible; exposure dose range - from 0.1 to 10 µJ/cm2; repeatability - <1 µm. The machine also has advanced automation capabilities for loading and unloading wafers, making it easy to maintain. In order to achieve the highest level of image quality, ASML Power box utilizes two main components; the scan lens assembly and the wafer stage system. The scan lens assembly consists of servo-driven mirrors that direct a light beam toward the wafer. The mirrors move in all 3 axes for setting the focus, spatial resolution, and exposure parameters of the lithography process. The wafer stage system is composed of a stationary table and a moveable stage, which moves in X, Y, and Z directions to direct the beam to various locations on the wafer. Various types of radiation can be used with Power box, including e-beam, extreme UV, ionizing radiation, and infrared. The machine is also equipped with several safety features, such as automatic shutoff and laser alarms. ASML Power box is an incredibly advanced tool that offers precise control over the lithography process. With its multiple illumination sources and high-quality images, Power box is ideal for manufacturing small devices with high feature density.