Used ASML Twinscan AT 1100B #293816605 for sale

ASML Twinscan AT 1100B is an advanced wafer stepper—a machine used in the semiconductor production industry for fabricating integrated circuits—produced by the Netherlands-based company ASML. It is an immersion-based stepper and uses both a dispersion-correcting, high numerical aperture lens and an advanced lithography equipment to pattern wafers with exceptional accuracy down to the 40 nm node. Twinscan AT 1100B has several components that make it an ideal machine for IC fabrication. The integrated dispersive-correcting optics reduce wavefront aberrations across the entire field and allow use at numerical apertures up to 1.35. Photomasks, which are used to pattern the wafer surface, are loaded onto a wafer stage, which is then translated over the wafer at resolutions ranging from 0.05 to 0.10 μm in the x- and y- axes. The machine is also equipped with a two-tone reticle feature which supports single exposure, double exposure, and multiple exposure applications. ASML Twinscan AT 1100B is designed with exceptional imaging and overlay capabilities, as well as a proprietary software platform for controlling the lithography system. The unit works with a dual-stage, in-chamber focus machine, compensating for defocus due to process non-uniformity, and includes both air bearing and motorized stage designs. Additionally, the machine is capable of in-situ process monitoring, allowing for faster feedback and corrections to the exposure process. Twinscan AT 1100B offers superior throughput and cost of ownership as well. The machine can scan up to 500 mm2 per hour and is both easy to maintain and cost-effective to operate. It has built-in tool integrity checks, as well as reliable servo control, which makes it a highly productive and efficient wafer stepper. Additionally, ASML Twinscan AT 1100B offers maximum flexibility in processes and materials tested, which means that it can handle a wide range of exposure processes from short exposure to multi-exposure recipes. In short, Twinscan AT 1100B is an advanced and versatile wafer stepper that is ideal for fabricating extremely accurate integrated circuits down to the 40 nm node. With its strong imaging and overlay capabilities, in-situ process monitoring features, and outstanding efficiency and throughput, ASML Twinscan AT 1100B is an ideal machine for the semiconductor production industry.