Used ASML Twinscan AT 1100B #293817722 for sale
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ID: 293817722
Wafer Size: 8" - 12"
Vintage: 2003
Argon Fluoride (ArF) Scanner, 8" - 12"
No lens data
2003 vintage.
ASML Twinscan AT 1100B is a high-precision wafer stepper designed for use in semiconductor manufacturing. The wafer stepper utilizes a highly accurate stage equipment, enabling the precise alignment and exposure of the entire wafer. The Twinscan sits on a centrally located gantry, which houses two independently moveable lenses. The lenses provide a powerful proximity focus system that ensures that the wafer is always in the same precise position, even after a lens shift has occurred. The AT 1100B features lens movements of less than 2.5 nanometers, with a total focus range of up to 1.73 microns. This level of accuracy ensures that the exposure will be consistent throughout the wafer even when the highest resolution photosensitive materials are used. The AT 1100B employs advanced optical gain control in order to maintain a steady exposure even with the highest resolution photosensitive materials, as well as to ensure consistent exposures even when the wafer is tilted during a shot. The wafer is illuminated by an X-ray source, with a beam width of 100 microns and a diameter of 0.2 microns. This produces an exposure field which covers a full wafer in just six seconds. The stepper also features an integrated advanced control unit, which allows the user to monitor and adjust the exposure field, as well as control the focus parameters. This allows the user to achieve the highest accuracy and uniformity across the entire wafer. Additionally, the AT 1100B features a wafer alignment machine which uses a sensor to determine the location of the wafer and adjust the exposure field accordingly. Finally, the stepper is equipped with a host of safety features such as a collision detection tool to ensure that the wafer is not damaged during its exposure. Additionally, the AT 1100B is rated for continuous duty, making it well suited for high-end, highly precise production lines.
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