Used ASML Twinscan XT 1250D #293602263 for sale
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ASML Twinscan XT 1250D is an advanced, highly precise and versatile wafer stepper designed to meet the production requirements of 300mm wafer applications. It is capable of handling a wide range of lithography layers from photoresist to metal and beyond. It features a high-speed 1250 mm scansion stage with precision linear motor drive and high-resolution encoders for precise positioning. The maximum stage velocity is 450 mm/s and it has a repeatability at the 10nm level. ASML TWINSCAN XT:1250D has an exceptionally large, high-resolution 11µm slit projector, with an optical resolution of better than 1 nm. The high resolution is achieved by the use of DCM (Dot Calibration Method) and dual overlay engines, both of which correct any imperfections to ensure exact imaging. Additionally, the equipment is equipped with a powerful Illumination Control (IC) package capable of managing up to four light sources and a challenging range of illumination environments. TWINSCAN XT 1250 D has a large, flexible, non-overlapped wafer field which can be customized to accommodate large die sizes. The system is capable of handling up to 15 wafers at one time and can work with a range of substrates; from silicon, germanium, polysilicon to epitaxial layers. Additionally, the unit can handle a range of wafer sizes; from 5 inch to 14 inch wafers. Twinscan XT 1250D is powered by an advanced control machine, which provides advanced features and full scalability of multiple microscopes, optomechanical components, motors, and sensors. It comes with advanced software tools and protocols designed to facilitate fast and accurate lithography. Its built-in diagnostics, Proactive Process Control (PPC), and vibration-free feeder make it easy to operate and maintain the machine. ASML TWINSCAN XT 1250 D tool is supported by a comprehensive set of services to ensure proper performance and longevity of the asset. These include on-site start-up and commissioning, model maintenance and support, replacement parts, and training. Additionally, ASML provides performance guarantees ensuring that the equipment meets its performance requirements.
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