Used ASML Twinscan XT 1250D #9207817 for sale
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ID: 9207817
Wafer Size: 12"
Vintage: 2004
ArF Scanner, 12"
RH Type: Right type
WH Type: SMIF
Workstation type: NETRA V240
Laser type: CYMER Laser
Uniformity: 0.93 % (<0.35 %)
Stray light: 0.53% (<1.0%)
Lens data
Spherical: 0.92 nm (-0.2 to 0.2)
Coma: 0.78 nm (-0.2 to 0.2)
Astigmatism: 1.1 nm (-0.1 to 0.1)
(3) Foils: 0.55 nm (-0.1 to 0.1)
(Z5-Z-37) 2.27 nm (-0.2 to 0.2)
2004 vintage.
ASML Twinscan XT 1250D is a wafer stepper used for the manufacture of integrated circuits. It is an advanced photolithography equipment capable of producing complex integrated circuit patterns onto semiconductor wafers. ASML TWINSCAN XT:1250D utilizes a four-channel laser, which is used to expose photosensitive resists. The laser produces exposure from it's four quadrants with a maximum resolution of 25 nm. The stepper also offers a fast scan speed, with an acceleration of 2 m/2s² and a maximum speed of 100 kHz. This enables TWINSCAN XT 1250 D to complete full step processes within seconds, in comparison to competing systems that take minutes to complete a single process. The stepper also offers extremely precise alignment accuracy of 0.15 µm over a 150 mm field size. This ensures that features printed at the edges of a wafer remain accurate and don't deviate from the intended pattern. Another advantage of TWINSCAN XT:1250D is its ability to automate tuning processes. Its algorithm enables the system to optimize its parameters and tune its process accordingly, allowing for repeatable results. This removes the manual steps required to optimize the unit and increases productivity. Twinscan XT 1250D is capable of operating in the soft to hard UV range, enabling it to work with a variety of resists and substrates. This versatility makes the stepper suitable for a wide range of production needs. ASML TWINSCAN XT 1250 D is a reliable and durable machine, designed to operate for over 24 hours without any maintenance. It also includes an advanced diagnostics interface that allows manufacturers to actively monitor the status of the tool and make changes when required. Overall, ASML Twinscan XT 1250D is a reliable and efficient wafer stepper asset, capable of producing complex integrated circuit patterns onto semiconductor wafers with precision and accuracy. It offers fast scan speeds, automated tuning processes, and can operate in the soft to hard UV range, making it suitable for a variety of production needs.
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