Used ASML Twinscan XT 1400F #293817723 for sale
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ID: 293817723
Wafer Size: 12"
Vintage: 2005
Immersion lithography system, 12"
2005 vintage.
ASML Twinscan XT 1400F is a wafer stepper designed by ASML, an industry leading semiconductor fabrication and lithography equipment manufacturer. The XT 1400F is the fourth-generation of platform technology produced by ASML, and is designed to be a comprehensive lithography solution for the manufacture of advanced memory, advanced CMOS logic, RF devices, as well as III-V logic and power device fabrication. The XT 1400F wafer stepper utilizes maximum numerical aperture(NA) up to 0.75 for the finest resolution that can be achieved in the semiconductor industry. Featuring an extensive lens range, the XT 1400F is capable of a wide range of functioning focal lengths with the highest range available up to 1450mm. This wide range of focal lengths allows for application to a variety of wafer sizes as well as a broad range of available process nodes. In addition to its high numerical aperture, the XT 1400F implements reliable and repeatable positioning through its fast, highly dynamic synchronous motors. The motors are designed with high resolution of 0.5 nanometers which allows for greater precision than traditional steppers. The XT 1400F's low noise, low vibration design makes it a perfect choice for high-precision applications in sub-22nm production nodes. Its advanced mask-handling technology provides accurate and reliable overlay measurements guaranteeing consistent achieved process results for frequently changing masks. The XT 1400F incorporates ASML newest track age technologies and process repeatability, making it the highest quality stepper on the market. It also features a multi-zone UV source design that offers extremely short pulse illumination times for improved critical dimension control. The XT 1400F also has IQCAS (In-line Quality Controllable Assisted Stepper) - ASML unique, quickly adjusting system that allows for a fast cycle time and more cost efficient throughput. With IQCAS, the cycle time can be automatically optimized using image measurements provided by the in-line scanner and by fine-tuning the illumination settings. Overall, Twinscan XT 1400F wafer stepper provides a highly reliable, high quality, and specialized solution for advanced memory, CMOS logic, RF and III-V logic and power device manufacturing.
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