Used ASML Twinscan XT 1470 #293817832 for sale
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ID: 293817832
Lithography system
Numerical Aperture (NA): 0.70-0.93
DCO: ≤4.5
Resolution: 57 nm
Throughput (WPH): 300.
ASML Twinscan XT 1470 is a state-of-the-art wafer stepper designed for high-volume production of advanced semiconductor devices. This tool plays a critical role in the lithography process, which is a key step in semiconductor manufacturing that defines the pattern of integrated circuit features on a silicon wafer. The XT 1470 is part of ASML latest Twinscan series, known for their precision, throughput, and resolution capabilities that enable the production of cutting-edge semiconductor technology. One of the key features of the XT 1470 is its ability to achieve extreme ultraviolet (EUV) lithography, which allows for the fabrication of smaller and more complex semiconductor devices. EUV lithography uses light with a wavelength of around 13.5 nanometers, significantly smaller than the wavelength used in traditional optical lithography systems. This enables the XT 1470 to print features with dimensions below 10 nanometers, pushing the limits of current semiconductor technology. The XT 1470 is equipped with a sophisticated lens system that is specifically designed to focus and shape the EUV light onto the silicon wafer with extreme precision. This lens system includes multiple mirrors and optical components that work together to ensure that the light is projected onto the wafer with minimal distortion and aberration. This level of precision is crucial for producing semiconductor devices with high yields and optimal performance. In addition to its advanced lens system, the XT 1470 is equipped with a high-precision wafer stage that allows for accurate positioning and movement of the silicon wafer during the lithography process. This stage ensures that the patterns are printed in the correct location and alignment on the wafer, contributing to the overall quality and consistency of the semiconductor devices being manufactured. The XT 1470 also features advanced automation and control systems that enable seamless integration with other tools in the semiconductor fabrication facility. This automation allows for high-throughput production, reducing cycle times and increasing overall productivity. The tool is also equipped with advanced monitoring and diagnostic capabilities that help users identify and resolve issues quickly, minimizing downtime and production losses. Overall, Twinscan XT 1470 is a cutting-edge wafer stepper that provides semiconductor manufacturers with the capabilities they need to produce the most advanced semiconductor technology. With its EUV lithography capabilities, high-precision optics, and advanced automation features, the XT 1470 is at the forefront of semiconductor lithography technology and is instrumental in driving innovation in the semiconductor industry.
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