Used ASML XT 1250D #9366114 for sale

Manufacturer
ASML
Model
XT 1250D
ID: 9366114
Wafer Size: 12"
Vintage: 2004
ArF Scanner, 12" 2004 vintage.
ASML XT 1250D is a wafer stepper designed for deep ultraviolet (DUV) lithography processes. The machine coordinates up to three optical components, including lasers, reticles, and lenses, to create sophisticated microchip patterns with single-digit nanometer accuracy. It provides the industry-leading illumination uniformity and fast scan times with superior dynamic beam control. XT 1250D is composed of a 1600 mm square frame that has a 7mm/s max speed. It is equipped with vibration isolation, three closed-loop air-bearing systems, and Z-bus integration. The product can also perform long-distance scanning of up to 420 cm while maintaining 15 nanometers of accuracy. In addition, the cutter can be customized to process a variety of wafer sizes from 125mm to 300mm in diameter. The optics array module found on ASML XT 1250D contains four Main Objectives and two Sub Objectives as well as one Reticle Objectives. It's equipped with a special 2X 0.5 NA 0.400 AR1 that provides a uniform irradiance across the entire wafer. Furthermore, a Liquid Crystal (LC) lens is placed between the object and the pupil to modulate the light according to the need of the application. XT 1250D is designed to deliver performance and precision for a variety of processing stages. It features a unique Dynamic Beam Control (DBC) system that enables higher frame rates and faster exposure times. Additionally, the product is capable of generating features as small as 20 nm and is ideal for today's advanced semiconductor processes. ASML XT 1250D is an industry-leading piece of cutting edge equipment that is routinely featured in high volume production facilities. Its combination of performance, precision, and reliability make it an ideal choice for advanced lithography processes.
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