Used ASML XT 1250D #9391534 for sale

ASML XT 1250D
Manufacturer
ASML
Model
XT 1250D
ID: 9391534
ArF Scanner.
ASML XT 1250D wafer stepper is an ultra-high performance lithography equipment designed to speed up the microelectronics manufacturing process. It uses a short-wavelength, 248 nm KrF laser projection system and is capable of producing printed images with resolutions as fine as 0.13 microns. The machine combines the imaging performance of a fully loaded scanner unit with the speed of a critical-dimension atomic force microscope. The machine is designed to facilitate the production of circuit patterns on integrated circuits, MEMS and optoelectronics components with resolving accuracy down to 0.13 microns while maintaining consistent reliability and throughput. It is equipped with a 5-axis robotic motorized wafer stage and a two-dimensional silicon reticle mask stage. The mask stage can move in two axes at a speed of 15.2 mm/s, and the wafer stage can move in five axes at a speed of 11.2 mm/s. The wafer stepper also features an on-board cleanroom with temperature control, air filtration systems, and active nitrogen systems. The optics machine of the machine includes an optical laser source, a condenser optical camera, and an image-forming lens. Additionally, the intra-field stitching capability of the machine allows it to adopt to form patterns on different substrates. XT 1250D wafer stepper comes with advanced stabilization and alignment features that ensure repeatability and precise alignment accuracy during wafer scanning and exposure. It also features an improved nanometer resolution sensor that can measure step heights, as well as alignment and critical dimension features. Furthermore, the stepper features a high-precision metering tool that allows it to accommodate high-aspect ratio metal lines and contacts. ASML XT 1250D wafer stepper is a powerful and efficient lithography tool that can be used for various requirements of integrated circuits, MEMS and optoelectronics components. It offers superior imaging performance, cleanroom environment and reliable throughput for high-volume production of circuit patterns on wafers. This machine is ideal for industries and R&D organizations in the semiconductor, MEMS, and optoelectronics industries.
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