Used ASML XT 1400 #9259958 for sale
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ID: 9259958
Wafer Size: 12"
Vintage: 2006
ArF Scanner, 12"
Process: Lithography
SMIF System
SMIF Loadport
Handler system:
Wafer handing robot
Reticle handler
Process chambers:
Exposure stage
Measurement stage
Reticle stage
CYMER Laser
MDC
LCWC
MCWC
WSRC
RSRC
ACC + ENTRGERIS Filter unit
Projection lens
2006 vintage.
ASML XT 1400 is a wafer stepper used in the semiconductor industry for precise patterning of advanced devices on silicon wafers. The machine offers the highest throughput available in the field, able to deliver 3,000 0.25-micron exposure layers within a single recipe. It guarantees total accuracy of every exposed mask, with a highest overlay throughput of 15 nanometers. XT 1400 is driven by a comprehensive low-voltage illumination scheme with a high flux output, meaning minimized power consumption and maximum patterning fidelity. Its exposure system also features an advanced software suite and optical subsystem to ensure maximum efficiency in patterning of devices. Equipped with highly optimized mask-handling algorithms and layer optimization methods, ASML XT 1400 can deliver optimal results in lithography cycle time. The machine is designed for uninterrupted wafer patterning with the highest throughput rates, featuring an automatic aperture handling system that adjusts according to the size of the device being fabricated. Furthermore, XT 1400 incorporates a robust thermal configuration with passive cooling and temperature compensation to ensure layer uniformity and zero-drift focus. In addition to its advanced lithography systems, ASML XT 1400 utilizes multiple beams in any position or orientation to bring manufacturing to a whole new level of sophistication. Its next generation Auto Alignment tool allows the comparison between the exposed wafer and the original mask layer with outstanding performance repeatability. XT 1400 is the highest performing stepper tool available on the market, delivering next-generation results with unsurpassed throughput, reliability and accuracy. This machine has the capacity of establishing production lines in device manufacturing plants that otherwise would not have been possible.
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