Used ASML XT 1400E #9383074 for sale

ASML XT 1400E
Manufacturer
ASML
Model
XT 1400E
ID: 9383074
Wafer Size: 12"
Vintage: 2006
ArF Scanner, 12" 2006 vintage.
ASML XT 1400E is a productive and reliable wafer stepper from ASML. It is a modular lithography platform designed with both productivity and performance in mind. It is especially suitable for difficult high-volume production applications such as 3D packaging and device scaling for advanced node lithography. XT 1400E wafer stepper is based on an advanced high-power, multi-field eXtended Source (X-Source) which produces parallel, multi-wavelength illumination, providing increased depth of focus and enhanced pattern placement accuracy. In addition, it is equipped with a state-of-the-art 4-level prealignment equipment that ensures repeatable and excellent accuracy across multiple exposures. ASML XT 1400E also features ASML hyper-NA optics, which enable high-resolution imaging down to the 193nm-wavelength limit and smaller linewidths. This ensures high yield and lithography quality for advanced node technologies. In addition, the platform is equipped with Zoom Lens grouping that provides improved coherence bandwidths. XT 1400E also offers superior temp stability and CD uniformity control capability. This is accomplished by the integrated thermal control system. This tightly guards the unit's imaging parameters, even as the machine temperature varies, ensuring consistently high lithography performance. Other features of ASML XT 1400E include the built-in Advanced Pattern Development (APD) software which consolidates all the essential lithography control functions into a single platform. This makes pattern data preparation effortless and eliminates many of the time-consuming processes typically associated with advanced node production. XT 1400E is a highly advanced wafer stepper that can guarantee first-rate performance in demanding lithography applications. Its combination of fast throughput, superior imaging quality, robust exposure control, large depth-of-focus capability, and comprehensive software support makes this platform an ideal choice for customers who wish to push the boundaries of lithography.
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