Used ASML XT 1700FI #293606031 for sale

ASML XT 1700FI
Manufacturer
ASML
Model
XT 1700FI
ID: 293606031
Immersion scanner.
ASML XT 1700FI is a wafer stepper used in photolithography applications. It is a very precise, high-accuracy machine with a variable shape imaging equipment and a die position fiducial recognition system. This unit minimizes the dispersion of the exposure field during scanning. ASML XT1700FI is designed to produce a constant, repeatable depth-of-field that enables process stability, minimizes particle generation and resolves small critical features. XT:1700FI is built with a high-power, precision optical machine that enables high-density and fine line-width lithography. This tool consists of two components: a two-ring optical asset and a beam-shaping model. The two-ring optical equipment is an optically symmetric system that uses constant track curvatures to reduce wavefront distortion. The beam-shaping unit is responsible for controlling the shape of the exposure field by reducing unwanted and undesirable off-axis points with a parametric aspheric and axial spacing techniques. XT1700FI also has an automated Zeemann Alignment machine that helps to reduce reticle distortion and misalignments. This tool is designed to correct image deformation in nanometer resolution during pattern transfer. ASML XT:1700FI is equipped with a field flattening asset consisting of an adjustable axicon, an adjustable retarder, and an adjustable intra-focal optical model, which helps to eliminate field curvature and distortion to produce high-definition, high-accuracy exposures. XT 1700FI is equipped with a robust control equipment to ensure the system's performance and accuracy. This control unit is designed with user-friendly and intuitive graphical user interfaces and advanced data analysis algorithms to provide real-time results. XT 1700 FI's performance can be further increased with the addition of optional features including a vibration isolation machine, a backside shutter mask, and a wafer aligner, which are all designed to minimize vibration during exposure cycles and improve wafer detail registration accuracy. Finally, ASML XT 1700 FI is extremely reliable and is designed to operate at a constant high performance. The machine is designed with extensive safety systems and performance diagnostics that monitor and control tool performance and reduce down times.
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