Used ASML XT 1700FI #293633102 for sale

ASML XT 1700FI is a high-end ultraviolet (UV) optics-based wafer stepper used in the semiconductor industry. It is a reductively illuminated reduction stepper that utilizes double exposure to produce effective aerial images. The stepper uses a 0.248/0.335/0.5nm multi-exposure stage with exposure time as short as 4.2s. It can provide line-edge roughness under 4nm, and stage motions with nanometer level accuracy and resolved step size in the sub-micron range. ASML XT1700FI employs the latest technology in its imaging equipment, featuring a highly advanced dual-source illuminator that provides optimized light intensity control. The dual illuminated sources allow for coverage of a wide array of designs in the wide process window, from single-pass double-exposure contact lithography to double multi-exposure orthogonal pairs. It provides a flexible system for process optimization and robust design execution. The wafer stepper has a high optical resolution of 4µm, a 5-tap encoder and an RMS accuracy of 28nm. It supports shot count and unit log storage up to 5GB. It has state-of-the-art alignment accuracy and an adjustable tool center point for advanced overlay capability. Its advanced programmable features also enable quick position protection, prevention of hot spot damage and reduced defectivity. The advanced camera machine of XT:1700FI provides up to 512x512 pixel sensor resolution with a dynamic focus of 0.3µm-3µm. Its sophisticated image processing features allow real-time focusing, dose optimization and imaging inconsistencies. Quadruple-exposure capability supported by the stepper adds sharpness to the highest resolution photomasks. ASML XT 1700 FI also enables process monitoring, wafer inspection and data logging with its built-in communication interface and expanded remote diagnosis capability. This allows operators to diagnose, observe and control production processes remotely. The stepper is also equipped with a "Ready-for -Link" remote operation tool to ensure higher throughput and process control. ASML XT:1700FI has been constructed with a modular design, making the stepper highly reliable, maintenance free and cost-effective, with the ability to be upgraded and extended. Additionally, it is a low-noise, low-vibration device and is compatible with a wide range of automated & robotic handling equipment. It is a powerful machine, capable of delivering high performance in a wide range of semiconductor applications.