Used ASML XT 1700FI #9379826 for sale
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ID: 9379826
Wafer Size: 12"
Vintage: 2006
ArF Scanner, 12"
Main body
Wafer stage
LMA Module
AOM Laser
EGPS
(5) Cover panels
Excimer laser
Charcoal filter
Spare parts
Cabinet:
ACC
MDC
ELEC
WICC
WISC
RSRC
MCWC
WSRC
2006 vintage.
ASML XT 1700FI is a wafer stepper designed for the processing of semiconductor devices. It is manufactured by Applied Materials and is the leading tool in the industry for high-volume production of advanced devices. The equipment is designed to provide the highest lithography and overlay accuracy available. ASML XT1700FI is capable of processing wafer sizes from 2 - 8 inch and has a nominal resolution of 438nm. The system delivers high quality imaging as well as excellent depth of focus control. The unit incorporates a full field lithography scan and can easily and precisely expose the entire wafer. The wafer stepper incorporates a unique scanner laser machine that enables higher exposure speeds. It also features a pair of 4.5 inch laser scanning tool lenses that allow for multiple exposure modes. The asset's electron beam maskless lithography exposure subsystem helps to reduce masking and inspection requirements. The electron beam maskless lithography can also reduce the risk of lithography damage. XT:1700FI is fully compatible with the industry's most advanced software, including ASML Digital Micro Imaging Software for alignment and overlay. It is also compatible with the most recent version of the Micron Tracker. The model is built with an advanced Industrial PC platform that offers high levels of reliability and stability. XT 1700 FI has a 5-axis orientation to ensure accurate tracking and scanning of the entire wafer. The equipment also includes a programmable illuminator and a wide array of accessories such as stigmators, diffusers, and darkfield optics. XT1700FI also features a high performance micro-focusing system that ensures that the wafer is exposed correctly across the entire surface. The micro-lens used to control the exposure resolution is also part of the unit. The machine's advanced control software helps to reduce operator errors while increasing productivity and throughput. Overall, ASML XT:1700FI is an industry-leading wafer stepper capable of producing excellent imaging results, while providing reliable and stable performance. This tool is ideal for advanced device processing and is designed to meet the highest production requirements.
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