Used ASML XT 1950Hi #293752405 for sale

Manufacturer
ASML
Model
XT 1950Hi
ID: 293752405
Wafer Size: 12"
Vintage: 2010
Lithography system, 12" (2) Load laser ports Hard Disk Drive (HDD) Immersion lithography with size:193 nm Resolution capability: 38 nm Overlay: 4 nm SMO / 7 nm MMO Throughput: 148 WPH (12" wafer with 125 exposures at 30 mJ) CYMER XLR-560i 193 nm 60 W/6 kHz Laser with E95 Bandwidth monitoring Semi compliant MENV and FIMS Assembly Controls: UNIX / SUN Architecture AERIAL XP P-type Illumination system Alignment: Blue align with narrow mark Focus and Field-by-field levelling Focus spot monitoring Circuit Dependent Focus Edge Clearance (CD-FEC) Dual E-chucks (Bonded SiC) LS-MATCH2 (XT) Image streaming Overhead reduction: 1 and 2 Productivity Enhancement Package (PEP) In-situ metrology: Sensor module ILIAS Lithoguide (SAMOS and PUPICOM) UNICOM XT Dose mapper ArF (15) QUASAR XL Slots Reticle shape correction 2DE Grid calibration Twinscan Overlay package Water cooling for electronics cabinet IRL-XP Integrated reticle library for H-SPEC Systems IRIS-XT Integrated reticle inspection system Reticle streaming Spotless G & H Twinscan Grid mapper TEAL PCDU-XT1900 Distribution unit FSM flex package Aux port 300 mm FOUP / 25 Wafers XCDA Gas purification system Purifier canister: Optics series, 10 MH, SS Reticle with defect: 40 nm SMASH XY Power conditioner: 135 kVA XCDA Gas purification system bypass manifold: Manifold three valve: 10 m Filter housing: Cabinet ESI EX2600 Filter set Standard and compliance: CE Marked S2 Compliant Manual Laser power: 60 W Throughput: 148 WPH ZEISS Starlight: 1950 2010 vintage.
ASML XT 1950Hi is a cutting-edge wafer stepper designed for high-volume production in advanced semiconductor manufacturing processes. This sophisticated lithography tool is manufactured by ASML, a leading provider of photolithography equipment for the semiconductor industry. ASML XT1950HI is specifically engineered to meet the demands of the most advanced integrated circuit (IC) fabrication facilities, offering unprecedented precision, speed, and reliability for producing smaller and more powerful semiconductor devices. At the core of XT 1950Hi is its advanced optical projection equipment, which utilizes deep ultraviolet (DUV) light sources to achieve extremely high resolution and pattern fidelity on silicon wafers. The stepper features a state-of-the-art lens system that can project complex circuit patterns onto the wafer surface with sub-nanometer accuracy, enabling the production of cutting-edge ICs with densely packed transistors and interconnects. The lens unit is meticulously designed and calibrated to minimize aberrations and distortions, ensuring the precise transfer of patterned features from the photomask to the wafer. XT1950HI is equipped with multiple innovative technologies to enhance productivity and yield in semiconductor manufacturing. One key feature is its advanced alignment and overlay control machine, which enables the stepper to accurately align successive lithography layers with sub-micron precision. This ensures that different patterns are perfectly aligned and stacked on the wafer, critical for achieving tight design tolerances and maximizing chip performance. The stepper also incorporates adaptive illumination techniques to optimize image contrast and quality, enhancing the visibility of pattern features and enabling higher patterning resolution. In terms of throughput, ASML XT 1950Hi is designed to achieve industry-leading productivity levels, with the ability to expose multiple wafers simultaneously in a continuous, high-speed operation. The stepper features a sophisticated reticle handling tool that allows for rapid reticle exchange and alignment, minimizing downtime and maximizing tool utilization. Additionally, ASML XT1950HI is equipped with advanced wafer stage technology that enables rapid and precise positioning of wafers, further enhancing overall throughput and productivity in semiconductor manufacturing environments. XT 1950Hi is also designed with a focus on reliability and uptime, featuring robust hardware components and sophisticated monitoring and diagnostics capabilities. The stepper incorporates advanced temperature control systems to maintain stable operating conditions and minimize thermal drift, ensuring consistent and reliable patterning performance over extended production runs. The tool is equipped with comprehensive metrology and process control capabilities that enable real-time monitoring of critical lithography parameters, allowing for proactive maintenance and optimization of tool performance. Overall, XT1950HI represents a state-of-the-art wafer stepper that sets new standards for precision, productivity, and reliability in advanced semiconductor manufacturing. With its advanced optical asset, innovative alignment technologies, high throughput capabilities, and robust design, ASML XT 1950Hi is ideally suited for high-volume production of leading-edge semiconductor devices requiring the most advanced lithography capabilities. ASML continues to push the boundaries of semiconductor lithography technology with ASML XT1950HI, enabling the next generation of IC advancements in the global semiconductor industry.
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