Used ASML XT 1950Hi #293752405 for sale
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ID: 293752405
Wafer Size: 12"
Vintage: 2010
Lithography system, 12"
(2) Load laser ports
Hard Disk Drive (HDD)
Immersion lithography with size:193 nm
Resolution capability: 38 nm
Overlay: 4 nm SMO / 7 nm MMO
Throughput: 148 WPH (12" wafer with 125 exposures at 30 mJ)
CYMER XLR-560i 193 nm 60 W/6 kHz Laser with E95 Bandwidth monitoring
Semi compliant MENV and FIMS Assembly
Controls: UNIX / SUN Architecture
AERIAL XP P-type Illumination system
Alignment: Blue align with narrow mark
Focus and Field-by-field levelling
Focus spot monitoring
Circuit Dependent Focus Edge Clearance (CD-FEC)
Dual E-chucks (Bonded SiC)
LS-MATCH2 (XT) Image streaming
Overhead reduction: 1 and 2
Productivity Enhancement Package (PEP)
In-situ metrology: Sensor module
ILIAS Lithoguide (SAMOS and PUPICOM)
UNICOM XT
Dose mapper ArF
(15) QUASAR XL Slots
Reticle shape correction
2DE Grid calibration
Twinscan Overlay package
Water cooling for electronics cabinet
IRL-XP Integrated reticle library for H-SPEC Systems
IRIS-XT Integrated reticle inspection system
Reticle streaming
Spotless G & H
Twinscan Grid mapper
TEAL PCDU-XT1900 Distribution unit
FSM flex package
Aux port 300 mm FOUP / 25 Wafers
XCDA Gas purification system
Purifier canister: Optics series, 10 MH, SS
Reticle with defect: 40 nm
SMASH XY
Power conditioner: 135 kVA
XCDA Gas purification system bypass manifold:
Manifold three valve: 10 m
Filter housing: Cabinet
ESI EX2600
Filter set
Standard and compliance:
CE Marked
S2 Compliant
Manual
Laser power: 60 W
Throughput: 148 WPH
ZEISS Starlight: 1950
2010 vintage.
ASML XT 1950Hi is a cutting-edge wafer stepper designed for high-volume production in advanced semiconductor manufacturing processes. This sophisticated lithography tool is manufactured by ASML, a leading provider of photolithography equipment for the semiconductor industry. ASML XT1950HI is specifically engineered to meet the demands of the most advanced integrated circuit (IC) fabrication facilities, offering unprecedented precision, speed, and reliability for producing smaller and more powerful semiconductor devices. At the core of XT 1950Hi is its advanced optical projection equipment, which utilizes deep ultraviolet (DUV) light sources to achieve extremely high resolution and pattern fidelity on silicon wafers. The stepper features a state-of-the-art lens system that can project complex circuit patterns onto the wafer surface with sub-nanometer accuracy, enabling the production of cutting-edge ICs with densely packed transistors and interconnects. The lens unit is meticulously designed and calibrated to minimize aberrations and distortions, ensuring the precise transfer of patterned features from the photomask to the wafer. XT1950HI is equipped with multiple innovative technologies to enhance productivity and yield in semiconductor manufacturing. One key feature is its advanced alignment and overlay control machine, which enables the stepper to accurately align successive lithography layers with sub-micron precision. This ensures that different patterns are perfectly aligned and stacked on the wafer, critical for achieving tight design tolerances and maximizing chip performance. The stepper also incorporates adaptive illumination techniques to optimize image contrast and quality, enhancing the visibility of pattern features and enabling higher patterning resolution. In terms of throughput, ASML XT 1950Hi is designed to achieve industry-leading productivity levels, with the ability to expose multiple wafers simultaneously in a continuous, high-speed operation. The stepper features a sophisticated reticle handling tool that allows for rapid reticle exchange and alignment, minimizing downtime and maximizing tool utilization. Additionally, ASML XT1950HI is equipped with advanced wafer stage technology that enables rapid and precise positioning of wafers, further enhancing overall throughput and productivity in semiconductor manufacturing environments. XT 1950Hi is also designed with a focus on reliability and uptime, featuring robust hardware components and sophisticated monitoring and diagnostics capabilities. The stepper incorporates advanced temperature control systems to maintain stable operating conditions and minimize thermal drift, ensuring consistent and reliable patterning performance over extended production runs. The tool is equipped with comprehensive metrology and process control capabilities that enable real-time monitoring of critical lithography parameters, allowing for proactive maintenance and optimization of tool performance. Overall, XT1950HI represents a state-of-the-art wafer stepper that sets new standards for precision, productivity, and reliability in advanced semiconductor manufacturing. With its advanced optical asset, innovative alignment technologies, high throughput capabilities, and robust design, ASML XT 1950Hi is ideally suited for high-volume production of leading-edge semiconductor devices requiring the most advanced lithography capabilities. ASML continues to push the boundaries of semiconductor lithography technology with ASML XT1950HI, enabling the next generation of IC advancements in the global semiconductor industry.
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