Used ASML XT 760F #9273568 for sale
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ID: 9273568
Wafer Size: 12"
Vintage: 2008
DUV Scanner, 12"
Sub process: Low KrF
Material / Chemical: Align
SMIF / FOUP
TEL / TOKYO ELECTRON Lithius Load module
Process module
Workstation
ETC
(70) Lenses
GIGA A700GK Laser
Machine parts and covering panels:
Wafer stage
Bottom module
Charcoal filter
Side channel blower
(5) Machine parts
Process module:
PM1: Light source
PM2: Alignment
PM3: Stage
Cabinet:
ELEC
MDC
LCWC
MCWC
RSRC
WSRC
Air control
Exhaust
Laser:
AOM
LMA
Excimer
Composition:
ETC
Parts
Tool
Operating system: UNIX
2008 vintage.
ASML XT 760F is a wafer stepper used for photolithography. It is a state-of-the-art machine capable of producing high-resolution components with minimal variance. It is designed to accommodate a variety of substrates, including quartz, silicon, and glass, so components can be produced with the exact specifications desired. ASML XT:760F is an advanced optical projection equipment which moves in the x, y, and z directions. It also contains a digital photo processor that can take measurements while imaging and ensure high-precision parts. It features a tilt compensator that corrects for misalignment of the substrate or mask that can occur, resulting in superior fine-pitch features. XT 760 F contains an 8-band light source that can accommodate various wafer sizes up to 12 inches in diameter with up to 20 wafers at a time. It also features a motor-driven semi-automated wafer handling system that can safely move the wafer without scratching or damaging the surface. The alignment and resolution of XT:760F are outstanding, with an accuracy of 0.4 µm and a line-width variation of 0.07 µm. This is ideal for ultra-fine-pitch components, and its powerful optical unit can focus feature sizes down to 0.2 µm. XT 760F is highly reliable and has an entire suite of safeguards to ensure consistency and accuracy with every part that is produced. It features a protective cabinet which houses the optics and a stationary, auto-cleaning machine that can be customized to meet any need. For the ultimate flexibility, ASML XT 760 F also offers maskless fabrication capabilities, allowing users to program it to quickly produce components without the need for a mask. This can reduce overall production costs and time. ASML XT 760F is a top-of-the-line wafer stepper and a great choice for anyone who is looking for a reliable and accurate machine capable of meeting the highest of standards. It is the perfect machine for those who need ultra-fine-pitch features or are looking to produce high-resolution components.
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