Used ASML XT 760F #9276965 for sale

ASML XT 760F is a high volume production semiconductor exposure tool (wafer stepper) with advanced imaging capabilities to support the most technologically advanced wafer production cycles. ASML XT:760F is a multi-stage equipment with a Chuck 6 and an Overlay Measurement System (OMS). It is capable of imaging 350mm wafers with a high level of accuracy and speed. XT 760 F is designed for critical imaging applications used in leading edge processes such as logic, memory, and high-end analog. It features a proprietary X-ray source, providing superior dose control and high energy resolution with minimal TIRF. XT:760F can image between 1 and 90 lines in a single exposure without the need for stitching. Advanced phase shift algorithms used in XT 760F allow for imaging on the most delicate patterned features without the use of stitching. ASML XT 760 F also features a sophisticated OMS which produces fast, reliable, real time corrections by measuring the overlay accuracy relative to an alignment layer. ASML XT 760F has a minimum feature size of 11 nm, can reach exposure ratios as high as 50:1, and supports a broad range of feature sizes between under 0.25 micron and up to 18 micron. ASML XT:760F enables fast throughputs of up to 3,500 wafers per hour with the support of a reliable unit for tracking and in-line metrology. XT 760 F is compatible with varieties of advanced Photoresist, including ArF, KrF, HSQ, and i-line, allowing for enhanced patterned feature fineness. XT:760F incorporates ASML Advanced Control Software Suite (ACS Suite), which is designed for intuitive, process-oriented control from an operator's single point of entry. The ACS Suite provides integrated algorithms for critical imaging functions such as dose, focus, alignment and exposure fidelity. XT 760F also includes a user-friendly touchscreen interface which supports wafer tracking, machine optimization and alarm functions. ASML XT 760 F can easily be integrated with existing, and new, ASML-Wafer Processing Systems featuring high tech wafer mapping and contamination monitoring technology. ASML XT 760F is designed for optimum imaging performance, and is certified to be compliant with recognized industry standards regarding electromagnetic, environmental, and safety requirements.