Used ASML XT 850F #9244892 for sale
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ASML XT 850F is a wafer stepper designed to create and inspect integrated circuits on wafers in a manufacturing lab. The stepper uses optical immersion lithography to create images on a wafer's surface through a series of highly precise motions and light exposure. It is capable of producing chips with incredibly high resolution up to 0.13 micron in the x-axis, and 0.20 micron in the y-axis. XT 850F utilizes a proprietary, high-powered laser equipment to expose the lithography pattern on a series of substrates. The laser is supplied with a multi-field optical system to create high illumination uniformity and generate improved scanning quality. The wafer is mounted to a chuck and moved by a high performance, linear motor-driven stage. For improved scanning uniformity, ASML XT 850F stepper includes a temperature control unit to maintain the wafer within one-tenth of a degree Celsius. It also features a highly sensitive, high-speed interferometer Closed Loop Metrology Machine to detect height variations accurately and quickly. The imaging tool on the stepper includes both an auto-focus and auto-exposure asset for superior focusing performance. It also utilizes a high-precision stepper stage, motor driven, stage for more accurate positioning and improved image quality. In terms of operation, XT 850F is constructed for ease of use and reliability. In addition to its extreme precision and repeatability, it is also designed with a number of safety features and special alarm functions to prevent and detect misalignment. It also features a long-working life with maintenance-free operation. Overall, ASML XT 850F is an incredibly versatile and reliable wafer stepper designed to produce high resolution, high precision integrated circuits on wafers. It boasts a variety of features, including a temperature control model, auto-focus and auto-exposure systems, a high powered laser equipment, and a Closed Loop Metrology System to ensure superior imaging performance, accuracy and reliability.
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