Used ASML XT 1700FI #9228927 for sale

ASML XT 1700FI is a high-performance, high-precision lithographic tool developed for advanced integrated circuit (IC) chip manufacturing. It is a template-based step-and-repeat exposure equipment incorporating an exposure source, an optical column and a wafer handling system. In the 1700FI model, the exposure head features an ultrafast Xenon lamp which offers exposure times up to two orders of magnitude faster than conventional sources. The exposure is further improved by the presence of in-column optical elements (such as a condenser lens and a relay lens), structured as a pulsed diffusion projection unit. The projection optics produce a highly uniform illumination pattern onto the wafer, resulting in repeatable and very accurate line/space exposure. The 1700FI's wafer-handling machine is designed to hold the wafer in a vacuum chuck during the entire exposure process. This ensures a tight grip on the wafer, which ensures the performance of the tool and prevents any damage to the wafer due to vibration. The wafer-handling asset can also provide a support to move or index the wafer stage for any laser alignment needs. ASML XT1700FI comes with both in-situ and off-line exposure capabilities, allowing for automation, flexibility and programmability. Offline programming and exposure are accomplished through the intuitive Interlock Interface Software, which provides powerful overlay calibration, dose ramping and flux optimization capabilities. Finally, the 1700FI is designed with a reliable and very first-time-yield performance, with in-field defect repairs and alignment verification procedures. This makes it a great device for cost-sensitive, high-volume IC manufacturing.