Used CANNON No210 #9284908 for sale

CANNON No210
Manufacturer
CANNON
Model
No210
ID: 9284908
System.
CANNON No210 wafer stepper is a leading-edge semiconductor lithography tool used for high-precision lithography of integrated circuits. The scanner-type mask aligner the tool is equipped with, enables fully automated and reliable alignment of patterns to substrates and photo-masks, allowing for fast and accurate photolithography processing. The device's scanner capabilities provide a resolution up to 1.2nm, and a shot area of 42x42mm (in a vertical direction X-Y plane). In addition, users are able to mount up to 6 exposure heads for multi-layer applications, and configure various opto-mechanical elements of the camera simultaneously. The CANON No210 has a micro-stage scanning capability which can be operated in several configurations. Single-shot stage scanning enables full pattern coverage of each image field at one time, while multi-field scanning allows for separation of field exposure in multiple parts and allows for higher exposures in each section, thus improving image and feature accuracy. The wafer stepper is also equipped with an array of features for automated operation. Automated exposure control continuously adjusts exposure parameters during the exposure process, while automated focus adjustment maintains optimal focus in both heights and widths across the entire wafer field. To ensure accuracy and stability throughout the exposure process, the device also offers automatic illumination control and design-rule-check (DRV) calibration. In summation, the CANON CANNON No210 is a sophisticated and comprehensive wafer stepper that can perform rapid and accurate exposure of integrated circuits. The combination of its scanner and micro-stage capabilities allow for a wide range of exposures and resolutions, while its automated features provide a reliable, consistent exposure process.
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