Used CANNON No36-3 #9284913 for sale

CANNON No36-3 is an automated wafer-stepper designed for automated exposure processing in semiconductor production applications. It is capable of exposure patterning using the high-contrast XTHC light from its x-axis moving source. The wafer stepper features an air suspension and a high-resolution imaging equipment, which improves throughput with a highly defined stepping precision and pattern repeatability. The XTHC light source enables it to accurately position the wafer for optimal processing. The fully automated capability with dynamic centring allows for greater uniformity and full-field imaging repeatability. In addition to its light intensity variations, it also features a high-resolution image sensor array and Xthc light power supply. The accuracy of this system is a hallmark of its performance, offering a high-resolution pattern stepping. The wafer stepper is constructed with a stainless-steel framework and includes four adjustable-stiffness damping arms that keep the wafer suspending uniformly and prevents vibration. The drive rail is in the Y-axis moving direction and a counterweight on the Z-axis allows for precise control of the Wafer alignment state. No36-3 uses a cross-stop motion profile with vibrometers in all three axes for high-resolution image acquisition under different loading conditions. The image analysis is done along the X-axis, with up to 16 peak sections per line. The scatterometry method is used to measure the scan line directions and the tilt angle of the wafer pattern. This data is then used during the image processing to generate a reprojected fuzzy line pattern for precise registration. CANNON No36-3 is equipped with a 20-bit encoder to control the wafer positioning and synchronized X-Y drives for optimal throughput. The stepper also has a Self-generated Program Code (SPC) and a menu-driven parameter controller for efficient operation. The self-contained process control unit offers a variety of exposure times depending on the process recipe and the exposure resolution. The machine allows for multiple-exposures and specialized operation for shutter blade control. With its auto-tuning and calibration functions, No36-3 ensures precise exposure which can be adjusted to create the desired pattern. The tool also has a tolerance range of ±10μm, making it suitable for high-resolution wafer-integration. CANNON No36-3 is an advanced automated wafer-stepper that can produce clear, accurate patterns on wafer substrates. Its state-of-the-art performance and features make it ideal for high-precision exposure processing in semiconductor production applications.