Used CANON 36-3 #9284914 for sale
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CANON 36-3 Wafer Stepper is a highly automated and precise machine used in the production of integrated circuits. It is capable of producing circuit patterns on a semiconductor wafer with high accuracy. It uses a technique known as step and repeat photolithography, which involves exposing the wafer to a pattern of light through a series of stepped masks. 36-3 is designed for high productivity, with a cycle time of only 6 seconds per step. It is equipped with a state-of-the-art vision system, which quickly identifies errors and ensures accurate results. The highly advanced optical system has a resolution of 365nm diameter, which renders it well suited for patterning the smallest nodes used in advanced lithography processes. CANON 36-3 uses a motorized multi-axis stage, which can handle a wafer up to 8 inches in diameter. The exposure stage includes 6 independently motorized axes, allowing for complex multi-pattern alignment with nanometer precision. Additionally, motorized servo values enhance exposure accuracy and reduce recipe development time. 36-3 Wafer Stepper comes with a user-friendly graphical user interface (GUI) which simplifies programming and eliminates the need for specialized programming knowledge. Custom recipes can be imported and exported via a built-in memory. The machine also includes online presetting, allowing for the accurate setting of wafer stages with the press of a single button. CANON 36-3 ensures maximum uptime, with automatic maintenance and a suite of advanced diagnostics that detect and report any abnormalities while the stepper is in operation. In addition, it includes a networking option capable of connecting with other machines in a network, allowing for easy data exchange. In summary, 36-3 Wafer Stepper is an innovative machine with state-of-the-art technical features, making it an ideal choice for high-precision photolithography. It features high accuracy, high speed, easy programming capabilities, and automated maintenance and diagnostics systems. It is the perfect choice for any integrated circuit production facility looking to produce highly precise patterns.
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