Used CANON ES5 #9227408 for sale

CANON ES5
Manufacturer
CANON
Model
ES5
ID: 9227408
Wafer Size: 8"
DUV Scanner, 8".
CANON ES5 is a high-specification wafer stepper used in the semiconductor manufacturing process. It is designed to make high-accuracy and high-throughput exposure processing of wafers possible and is capable of realizing extremely high-accuracy scanning-exposure processing for sub-micron wafers. CANON ES-5 uses a 500-mm-square field with a spatial accuracy of 0.047 microns (total accuracy of the equipment is equal to or less than 3.5 nm) and an exposure accuracy of 0.25 nm. It is equipped with a unique scanning system that enables accuracy improvement even when processing printed circuit boards of various shapes. ES5 utilizes an ultra-high-speed wafer handling unit that is capable of processing up to 48 wafers in one stroke with no leakage. This enables wafer exposure at high speed and with high accuracy. ES-5 has an M12 motorized diffraction-type auto-stage, which provides high-precision alignment and repeatability in high-speed scanning mode. In addition, a motor-driven auto-focus mechanism and a full overlap scan mode are employed to ensure high-quality exposure of wafers. An image processing machine is also built into the stepper which is used to correct defect images and reduce overall exposes times. In addition, CANON ES5 combines a high-precision, high-speed reticle stage with the laminated glass substrate, making it a suitable choice for a wide range of thin-film devices. An additional feature of this machine is its advanced control tool, which provides stable and accurate positioning. The stepper also incorporates an advanced proprietary optical asset, which uses a combination of lenses and mirrors in order to reduce optical distortion and minimize flare. This results in high-quality images with superior image resolution and high contrast. Finally, CANON ES-5 also features a vacuum model and integrated receptacles for small wafers, enabling easy installation and loading. The stepper also offers a range of automatic loading and unloading features, which ensure that wafer handling is kept to an absolute minimum. All in all, ES5 is an incredibly reliable and efficient stepper designed for optimal SEMI-standard exposure processing and accurate positioning of wafers. It can achieve high-precision alignment and exposure accuracy, while reducing overall exposure times. This allows manufacturers to produce high-quality and precise products which can be utilized in a wide variety of applications.
There are no reviews yet