Used CANON EX5 #293778968 for sale

CANON EX5 is a flagship wafer stepper manufactured by CANON Inc. It was developed in 1986 and has been the industry standard for precision lithography for over 30 years. EX5 is designed for high-volume industrial applications, such as chip fabrication, and is capable of producing micro-miniature and intricate images with superior accuracy. CANON EX5 is a step-and-repeat equipment capable of producing images from a master wafer up to 10" in diameter. It is equipped with five-axis motion capabilities, allowing for full positional control and accurate alignment of the master and target wafers. The system also features a unique die alignment unit, which allows for accurately positioning the individual dies on the target wafer. With its high repeatability and positional accuracy, EX5 is capable of producing images with extremely high levels of detail and uniformity. CANON EX5 utilizes CANON patented Sinusoid grating, which is an advanced photolithography technology that enables a finer resolution than standard contact methods. This is done by placing a sinusoidal array of laser beams on the wafer, producing an interference pattern that exposes specific areas on the wafer. By controlling the angles and angles between the lenses and their centres, different structures can be created or modified on the wafer. EX5 also features a unique substrate heating technology, which allows thermal uniformity of the master and target wafers. This prevents uneven pattern spreading and image distortion caused by temperature variations. In addition, CANON EX5 also offers enhanced autofocus and autofocus-based wafer steppers, which enable the machine to recognize rapid changes in the wafer and quickly adjust the focus accordingly. Lastly, EX5 features a high level of versatility in terms of tooling, as it can be used with interchangeable masks and lenses, as well as custom-made lenses. This allows for a higher degree of customization in terms of patterning and lithography options. All of these features, combined with its affordability, make CANON EX5 an ideal lithography solution for any industrial application.