Used CANON EX6 #9352053 for sale

CANON EX6 is a wafer stepper used in semiconductor chip fabrication process. It is used to produce the most consistently detailed and complex patterns on the wafer. It is equipped with a imaging mirror that is used to project the image of the mask onto the wafer. The mirror can tilt and focus on both axis simultaneously, resulting in the highest precision placement accuracy and image distortion correction. EX6 also features a new High-Resolution Ratio Expander (HRRE). This technology provides extremely precise and sharp imaging characteristics for finer lines and stellar focus over the entire active area of the wafer. The HRRE is equipped with 8 lenses and 4 mirrors to guide the light from the mask onto the wafer, and delivers profile display of lines and surfaces of < 0.08 μm. Additionally, CANON EX6 features an extraordinary 3-dimensional acceleration/deceleration system, which reduces positioning time while maintaining accuracy, and boosts productivity. EX6 is designed to facilitate the advancement of device scaling by incorporating a Digital Image System (DIS). This system employs an image sensor array and incorporates feedback technology to provide options for optimizing resolution of patterns.The DIS allows adjustment of stage movement deceleration speed and scanning speed to precisely position the wafer to the mask. In addition to these remarkable features, CANON EX6 is designed to reduce particle damaging and particle contamination of the wafer by using a super pure water jet technique to clean the wafer while it is in the stepper. EX6 has also been equipped with advanced diagnostics features to enable user customization of alignment and overlay parameters. Its intuitive and user-friendly graphical interface enables users to analyze stepper operation data and optimize operation performance. CANON EX6 is capable of achieving the highest accuracy, precision and quality of imaging that is necessary for semiconductor manufacturing, and is the ideal choice for those involved in semiconductor chip fabrication.