Used CANON FPA 1550 MARK IV-W #9196317 for sale
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CANON FPA 1550 MARK IV-W is a wafer stepper used in the semiconductor production process to accurately transfer lithography patterns onto wafers. The machine is capable of processing substrates up to 24 cm in diameter and can achieve an alignment accuracy of 2.5 μm. It utilizes a fully motorized alignment equipment which includes the XY stage, turret, and Z linear stage in order to ensure precise motion control and high processing speed. The stepper uses a mercury-arc lamp to project the plate master onto a wafer at a wavelength of 193 nm. The machine is equipped with a Laser Interference Pattern Aligner (LIPA) system that measures the spatial relationship between the plate master and the wafer and allows for quick exposure time adjustment. In addition, the stepper utilizes die-to-die exposure to ensure the necessary accuracy of the lithographic pattern. CANON FPA 1550 MARK IVW uses on-board programmable devices to control the repetition rate and exposure conditions. It also has the option of using an external computer to simplify complex pattern generation operations. Furthermore, the machine is equipped with 3D laser interferometer sensors which enable real-time feedback and correction of the wafer movements. For safety, the stepper features an emergency stop button that can be used to immediately cut the power to the unit and initiate a safe shutdown sequence. Additionally, the machine is able to detect wafer loading errors by using an optical grating sensor machine. Overall, FPA-1550 MARK IV-W is an advanced and reliable stepper used for complex lithography processing in semiconductor production. Its motorized alignment tool and on-board programmable devices allow for quick reaction and adjustment, ensuring a high standard of accuracy and efficiency. Moreover, it features numerous safety mechanisms for improved operational control and protection of both personnel and equipment.
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