Used CANON FPA 2000 i1 #10608 for sale

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Manufacturer
CANON
Model
FPA 2000 i1
ID: 10608
Wafer Size: 6
Vintage: 1994
Stepper, 4"-8" Type: 4 AF Reticle, 5" 1994 vintage.
CANON FPA 2000 i1 is a state-of-the-art wafer stepper designed to meet the highest possible accuracy and performance requirements of the semiconductor industry. The equipment features a semiconductor wafer size of up to 200mm and offers a series of advanced imaging technologies and motion controls. CANON FPA2000-I1 supports a variety of exposure formats, including circular, multiple shaped and super-high aspect ratio. It also supports a wide range of exposure patterns, including binary repetitive, complex shot, super-high aspect ratio and gang patterns for ultra fine line widths. FPA-2000I1 is the only system in its class to provide multi-imager and multi-zone stepper performance. The multi-zone stepper feature allows the unit to fine-tune the exposure field throughout the whole wafer for improved accuracy and performance. The machine also features an advanced pattern modeler and an integrated metrology tool. The pattern modeler accurately estimates the location of each exposure and compensates for any wafer distortion. The metrology asset ensures accurate placement of each exposure using high-precision laser scanning. CANON FPA-2000 I1 is equipped with a new generation of motion controllers which enable fast and precise alignment, exposure, and wafer movement. Additionally, the model features a hybrid alignment equipment which uses a combination of autofocusing and CCD imaging with sub-pixel accuracy. Moreover, CANON FPA-2000 I 1 is designed with a new generation of image synthesis algorithms and a user-friendly graphical user interface. Overall, CANON FPA 2000 I 1 is a high-performance wafer stepper that is designed to meet the exacting standards of the semiconductor industry. It offers superior performance, accuracy, and reliability, making it a reliable choice for wafer fabrication.
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