Used CANON FPA 2000 i1 #9251787 for sale

CANON FPA 2000 i1
Manufacturer
CANON
Model
FPA 2000 i1
ID: 9251787
Wafer Size: 6"
Vintage: 1999
i-Line stepper, 6" 1999 vintage.
CANON FPA 2000 i1 is an advanced wafer stepper specifically designed for microfabrication applications. This highly precise and accurate machine is capable of delivering impressive results, making it the ideal choice for the most demanding production process. CANON FPA2000-I1 provides a reliable and repeatable platform for patterning thin films, with an alignment accuracy of ±1.5 micron. It employs a wafer scanning technique which means it is able to scan the wafer along the x-axis and y-axis (in the Y-direction) at a resolution of 4.7 microns through high-resolution optics. It utilizes a telecentric optics with a 4.7 micron spot size, ensuring high levels of precision. Meanwhile, this device also has programmable exposure time and multiple exposure options, allowing users to tailor the exposure to specific layers of the wafer. The advanced FPA-2000I1 also features both top and bottom vision systems, which provide the ability to align patterns with greater accuracy and repeatability. Additionally, it enables users to measure wafer thickness and overlay alignment with greater accuracy. Along with a rigid s/N control system, this stepper is able to maintain precise alignment throughout the entire process cycle. CANON FPA-2000 I 1 is built with an automated loading and unloading system, as well as on-board cluster tool and integrated spin coater-developer. This makes it even easier to use and suitable for a wide range of applications. Despite its advanced features, FPA 2000 I 1 is relatively simple to operate unlike other advanced wafer steppers. CANON FPA 2000 I 1 is perfectly suited to lithography processes, giving users the ability to perform various tasks with precision. From patterning nanoscale structures to packaging micro-electronic devices, this device integrated design allows users to complete the most advanced processes with ease. All these features make it an ideal choice for production and research environments. It can help boost productivity and allows users to generate impressive results every time.
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