Used CANON FPA 2000 i1 #9313277 for sale

CANON FPA 2000 i1 is a wafer stepper, a high precision instrument used for the fabrication of semiconductor devices. The equipment is designed to align and position single and multiple wafers in order to improve the efficiency and accuracy of semiconductor device production processes. CANON FPA2000-I1 is equipped with a highly sensitive and accurate XY scanning stage for accurate alignment of pattern features with wafer patterns. The stage is driven by high-resolution direct drive motor that enables precise and accurate scanning during WAAM (Wafer Alignment and Masking) processes. Additionally, the system is equipped with an inspection camera unit that uses proprietary software to inspect complex wafer patterns for defects or variation. FPA-2000I1's field area is sufficient enough to enable a variety of processors to be patterned on a single wafer. It features a high resolution image sensor and a real-time processing machine, which provides single patterning with extremely high resolution. Additionally, it features halogen high-illumination lamp that supports a broad range of wafer substrates sizes and shapes, improving production efficiency. FPA 2000 I 1 also features a high speed vector stepper algorithm, which enables high speed lithography exposure. Located at the bottom of the XY stage is a long vacuum slot which is equipped with multiple suction cups enabling secure and steady handling of substrates throughout the exposure process. This high precision tool is managed by CANON EDS-2 (Exposure Data Storage Asset) and CANON PST-3 (Process Sparing Tool) providing accurate wafer edge detection, excessive damping of wafer motion, and wafer-level defect inspection. CANON FPA 2000 I 1 also has a temperature-stable environment to ensure consistent operation in different environmental settings. In short, FPA-2000 I 1 is a high-precision wafer stepper designed to support the fabrication of special semiconductor devices and circuits. It is an ideal instrument for high speed and accurate wafer alignment and processing. It is equipped with a precise XY scanning stage and a long vacuum slot and is managed through CANON proprietary software programs.