Used CANON FPA 2500 i2 #9298425 for sale
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ID: 9298425
Wafer Size: 6"
Vintage: 1994
Stepper, 6", parts system
Power: 18.7 kVA
Reticle size: 6", CANON STD
Wafer feeder: Type-L
PA Unit: 6", O.F Type
Chamber: TBW-CD60
Illuminator: FPA-2500 i line
A Scope: i-line, TTL
T/Z-Tilt Unit: 3 (L,M,R)
Support mount: Servo passive damper 4
Lamp house: 1.5 kW
Electrical: 3Ø, AC 200 V, 50/60 Hz
1994 vintage.
CANON FPA 2500 i2 wafer stepper is a precision device used primarily in the fabrication of integrated circuits. Specifically, it is an optical stepper, meaning it uses light to image patterns onto a reticle stage for printing onto wafers or other substrates. This stepper uses a high-power 200 Watt YAG laser to pattern its reticles at resolutions as high as 0.5 µm, allowing for highly precise imaging of its source patterns. To ensure accuracy, it has a positioning system that features a motorized Z-Axis, which is used to shift the reticle and align it correctly with the wafer. The machine is constructed of a mix of metals and composites, giving it immense strength and enhancing its reliability. The optics of the device are comprised of refractive, diffractive, and other high-performance elements, allowing for superior imaging. Additionally, the optics are kept in a constant environment with the aid of a Nikon Dust-Free Chamber, which removes debris and contaminants that can cause imaging errors. CANON FPA-2500I2 is compatible with all DUV/NUV lithography systems. With its high-precision controls and precision imaging capabilities, this wafer stepper can produce exceptionally intricate images whether printing on silicon wafers, chips, or similar substrates. The machine has two serial ports that can be used to connect external controllers, allowing images to be processed and then sent to the stepper. Furthermore, a CD-ROM drive and 2.4 Gb hard drive are included, which enable users to back up and quickly load data. Finally, the machine is rated for operation up to a temperature of 35°C, so operators can work in relatively warm environments without compromising results. In conclusion, FPA-2500 I2 wafer stepper is an impressive piece of equipment. Its combination of reliable hardware and sophisticated optical elements make it a top-notch choice for the fabrication of integrated circuits and other precision applications.
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