Used CANON FPA 2500 i2 #9298440 for sale

Manufacturer
CANON
Model
FPA 2500 i2
ID: 9298440
Wafer Size: 6"
Vintage: 1994
Stepper, 6", parts system Power: 18.7 kVA Reticle size: 6", CANON STD Wafer feeder: Type-L PA Unit: 6", O.F Type Chamber: TBW-CD60 Illuminator: FPA-2500 i line A Scope: i-line, TTL T/Z-Tilt Unit: 3 (L,M,R) Support mount: Servo passive damper 4 Lamp house: 1.5 KW Electrical: 3Ø, AC 200 V, 50/60 Hz 1994 vintage.
CANON FPA 2500 i2 is a high-end step-and-repeat wafer stepper designed for high throughput wafer production. It is capable of processing wafers from 150mm to 450mm in diameter, offering unprecedented accuracy, repeatability, and throughput. Its fast scan time makes it ideal for substrates used in the semiconductor industry, as well as being an excellent choice for rapid prototyping and high-volume production. CANON FPA-2500I2 wafer stepper utilizes a dedicated focus ion beam (FIB) equipment to accurately place each wafer onto the reference plane. An integrated, high-resolution imaging system further helps to ensure precise placement of each wafer. To ensure accuracy and repeatability, FPA-2500 I2 is equipped with a stage drive unit comprised of two motors that are used to position the wafer in both X and Y axes. Additionally, the machine is designed to accept wafer temperatures ranging from -60 to 160°C, allowing for deposition and process temperatures that are suitable for a wide variety of applications. The optical imaging tool consists of a 10x macro objective lens and twoc flat (telecentric) lenses that support a unique sensor with a pixel size of 20μm. This provides accurate visualization of each wafer edge, which is used to detect and correct misalignments. This ensures excellent wafer morphology and edge integrity when shooting and subsequently relieving the wafers. Other features of FPA-2500 I 2 include an optimized laser displacement monitor, a two-stage cooling asset, and an integrated Dewar flange for easy wafer handler attachment. FPA 2500 I 2 is also built to be able to handle a maximum of three layers of wafers at once, with a maximum load capacity of approximately 500kg (7.5 ton). FPA 2500 i2 is a premium wafer stepper that is designed to meet the needs of the most demanding production applications. Its high throughput and accuracy make it suitable for high production runs, while its advanced feature set and robust design make it ideal for wafer production in extreme manufacturing conditions. With its FIB-based wafer placement, its high-resolution imaging capabilities, and its flexible temperature range, CANON FPA-2500 I2 is an essential tool for any production setup.
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