Used CANON FPA 2500 i3 #293601755 for sale

CANON FPA 2500 i3 is an immersion-type wafer stepper that allows for precision lithography processes with high-resolution patterns. The stepper operates by projecting light through a mask onto a photoresist coated wafer surface. The machine is capable of producing patterns with a resolution of 0.25-1.0 micrometer. The platform design of CANON FPA-2500I3 is lightweight and flexible, allowing the machine to be used in a variety of settings. The machine supports several optical systems, such as: i-LINE, DUV, and DUV ArF. The mask adopts a 6" turbo-rotation reticle for improved productivity and smaller pattern overlay. Additionally, the stepper features a large working surface which allows for larger sized wafers to be processed. For protection against surface contamination, the machine's optics are designed to be liquid-immersed and enclosed. To further protect the optics, an ionizer is integrated into the machine to eliminate static electricity from the environment. This ensures that there is no interference with image quality. The machine also has an ACR (anti-contamination-reflex) unit, which helps reduce the amount of particles in the air by 95%. High throughput is a major goal of theCANON FPA-2500 I3 and the machine is equipped with a number of features to help achieve this. The camera incorporates a five-chip CCD sensor which allows for faster image capturing. The stepper can process up to 170 wafers/hour, while allowing excellent image fidelity and producing high-resolution patterns. To further increase throughput, the machine utilizes CANON "Autofocus-and-Align" feature which allows for rapid and accurate alignment of the mask and wafer. The machine operates with the use of an onboard computer, which is connected to all of the various motion controllers. This centralized control system provides for high precision and accuracy. Additionally, the machine has a built-in communication interface which allows for remote operations, data transfer, and machine diagnostics. As a safety measure, the machine also has an anti-bumping device, which prevents the machine from moving before proper verification of all alignment parameters by the user. Overall, FPA-2500I3 is an excellent machine for precision lithography processes. It is highly automated and can produce high-resolution patterns of excellent quality with high throughput. The machine's flexibility and safety features make it an ideal tool for many different types of applications.