Used CANON FPA 2500 i3 #293749144 for sale

Name: CANON FPA 2500 i3
Brand: CANON
SKU: 293749144
Availability: InStock

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Wafer Steppers

Manufacturer

CANON

Model

FPA 2500 i3

ID: 293749144

Stepper Accuracy: 0.4 µm Auto focus repeatability: 3 Sigma ≤ 0.12µm Die by die levelling repeatability: 3 Sigma ≤ 10ppm Mechanical alignment accuracy: 3 Sigma ≤ 40µm Lens performance: Resolution: ≤ 0.40µm Depth of focus: ≥ 0.8µm Image field deviation: R ≤ 0.55µm Distortion (including mag.): ≤ 0.07µm Illumination: Intensity (1.5 kW input): ≥ 550 mW/cm² Uniformity: ≤ 1.2% Light integrator accuracy: ≤ +1.2% Masking blade accuracy: ≤ +100µm Alignment: Reticle rotation accuracy: ≤ +0.02µm Reticle rotation repeatability: R ≤ +0.03µm AGA HeNe TV Alignment: lml+3sigma ≤ 0.10µm AGA B2 TV Alignment: lml+3sigma ≤ 0.10µm XY Stage: Stepping accuracy: 3 Sigma ≤ 0.06µm Scaling: ≤ +1.0 ppm Orthogonality: ≤ +1.0 ppm Throughput: Left inline: Levelling off: 6" (45s) ≥ 62/hr 8" (78s) ≥ 44/hr Levelling on: 6" (45s) ≥ 57/hr 8" (78s) ≥ 40/hr Right inline: Levelling off: 6" (45s) ≥ 61/hr 8" (78s) ≥ 44/hr Levelling on: 6" (45s) ≥ 56/hr 8" (78s) ≥ 40/hr Reliability: Reticle running and wafer running.

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CANON FPA 2500 i3 is a wafer stepper designed for high-precision lithography. It uses a high-resolution projection equipment to accurately and quickly transfer circuit patterns onto wafers. The system can switch between exposures of different resolutions and angles with a minimum of time and energy. The high-precision projection lens is ideal for various critical imaging techniques, including deep-UV lithography and step-and-repeat lithography. The unit can handle multiple types of media, such as 8-inch, 12-inch, and large substrates. CANON FPA-2500I3 stepper uses a powerful two-axis scanning machine to take full advantage of its projection lens. Additionally, it features a high-stability frame and dedicated vibration damping tool that reduce vibration and improve accuracy. The asset's high-end servo and motion controls offer highly precise and repeatable performance. The model uses a closed-loop electronic control equipment to achieve the highest actual imaging accuracy. Special alignment and de-scattering technology also help to increase precision. FPA-2500 I3 uses an advanced robotic interface and is capable of supporting both inline and slanted assemblies. It makes use of a combination of vision alignment sensors and non-contact measurement systems. This ensures that the wafer can be properly positioned before exposure, eliminating any misalignment. In addition to its imaging capabilities, CANON FPA-2500 I 3 also has advanced safety and environmental features. Its advanced air-cooled circuit design maximizes cooling efficiency, so users don't have to worry about overheating. And the system's software can be updated remotely over a network connection. Finally, FPA-2500 I 3 is highly reliable and comes with a standard one-year warranty. The company also offers extended service contracts, making it an ideal choice for users who require dependable performance over a long time. With its impressive features and high-precision imaging capabilities, CANON FPA 2500 I 3 is one of the best wafer steppers on the market.