Used CANON FPA 2500 i3 #293809116 for sale

CANON FPA 2500 i3 wafer stepper is a high-performance, high-resolution lithographic machine used for production of small semiconductor devices and components at the 0.25 micron process node. It features an advanced, large field of view stepper that utilizes i-line optics to generate patterns onto the substrate surface with high-precision and accuracy. CANON FPA-2500I3 features 9,500 stepper pixels, along with active alignment capabilities to improve NA (Numerical Aperture) as necessary. This allows for accurate, repeatable pattern placement and overlay from wafer to wafer, as well as from lot to lot. It is equipped with a 1:1 projection lens, which allows for the generation of evenly distributed patterns without the need for artwork. Additionally, the i3 stepper incorporates a 10x stage, making it ideal for large wafers. FPA-2500 I3 Wafer Stepper is designed to handle a range of substrates, from 4-inch to 12-inch. It is equipped with an advanced imaging equipment to provide optimum resolution for different exposures. Additionally, the stepper includes an Air Brush Module to provide integrated baking and degassing of the substrate prior to exposure. FPA-2500 I 3 is capable of operating at an aspeed of up to 500 wafers per hour, with a throughput of up to 75 wafers per hour. FPA 2500 I 3 Wafer Stepper has a multi-zone temperature control system that adds uniformity to the exposure environment and ensures high accuracy and throughput. Additionally, the stepper includes a low distortion, anti-vibration unit that reduces thermal distortion in the substrates. It also includes an Active Clean machine to reduce static electricity, thus ensuring uniformity and accuracy during patterning. CANON FPA-2500 I3 Wafer Stepper is equipped with a user-friendly operating tool to provide highly efficient and intuitive operation. Additionally, the asset comes with a specialized software suite that helps reduce the time and cost associated with testing and verifying new substrates. CANON FPA-2500 I 3 power supply is optimized for reliable and consistent operation, reducing the complexity of the setup process. The stepper comes with built-in anti-corrosion mechanisms and dust proof design to increase reliability and decrease maintenance costs.