Used CANON FPA 2500 i3 #293817809 for sale

CANON FPA 2500 i3
Manufacturer
CANON
Model
FPA 2500 i3
ID: 293817809
Stepper Numerical Aperture (NA): 0.6 Resolution: 400 nm Throughput (WPH): 44-200.
CANON FPA 2500 i3 wafer stepper is a major leap forward in lithography technology. It is designed to be used in the production of highly complex integrated circuits in the electronics industry. Its precision and capabilities open up a wide range of new possibilities for the development of cutting-edge ICs. CANON FPA-2500I3 has a 5 micron spot size and can achieve around 0.15 micron line width accuracy with 25 nm overlay accuracy. Furthermore, it can distribute multiple exposure doses at a low dose and high resolution without the need for a long focus time. This makes it suitable for the next generation of medium- and high-voltage ICs. FPA-2500 I3 operates with a 157 nm wavelength, which makes it extremely suitable for applications such as 0.18 μm to 65 nm technologies. The tool offers a high level of pattern uniformity and can compensate for alignment errors of up to 0.30 microns. This makes it possible to produce highly accurate patterns without requiring a high number of exposures. The stepper is also equipped with a wafer-level controller that is capable of performing fast wafer alignment, auto-focus adjustment and wafer-level data collection. It has the ability to manage multiple wafers at once, and it can be updated with the latest software and algorithms to allow for the highest peak of accuracy and precision. In terms of productivity, FPA 2500 I 3 is one of the fastest wafer steppers on the market. It has a scan speed of up to 120mm/sec, and it can easily perform up to 150 wafer scans per hour with its light weight platform. This makes it suitable for high-output fabrication facilities. The energy consumption of FPA-2500I3 is also low, and it incorporates an energy-saving feature which minimizes the tool's power consumption while still achieving an optimal performance. This helps to reduce the operational cost of the machine in the long-term. Overall, FPA 2500 i3 is an advanced wafer stepper that provides superior precision and productivity for the fabrication of next-generation ICs. Its advanced features help to minimize operational costs and ensure a consistent and accurate result.
There are no reviews yet