Used CANON FPA 2500 i3 #9164887 for sale

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Manufacturer
CANON
Model
FPA 2500 i3
ID: 9164887
Wafer Size: 4"
Stepper, 4" Reticle, 5".
CANON FPA 2500 i3 is an advanced wafer stepper used for semiconductor device manufacturing. The equipment utilizes state of the art resist processing and imaging technology, delivering precision alignment and lithography for multi-layer Fresnel Zone Plate (FZP) and array circuits. In addition to ultra-fine image fidelity, the system provides fast data throughput, high throughput, high accuracy, and low native consumption. CANON FPA-2500I3 utilizes a full-sized 8-inch wafer loading capacity, with an enhanced optical unit for improved resolution and contrast. The machine features a high-accuracy high-precision XY stage for precise alignment of the wafers. In addition, the onboard motion stabilization tool eliminates vibration and improves image quality during exposure. FPA-2500 I3 is compatible with both traditional multi-layer FZP and the more advanced array circuits. It features advanced optics and lithography technology, providing high resolution printing on small geometries. The asset also provides fast throughput rates and high speed exposure for ultra-fast device fabrication. The onboard resist technology provides high contrast, low-temperature and quick-drying processes. The built-in lithographic optics and slab wave technology optimize optics for the integrated array circuit, delivering precision imaging and improved accuracy and throughput. The model also offers a wide range of metrology tools, for measurement of both device and lithographic alignment. The equipment is also integrated with a comprehensive suite of software tools, providing off-line data analysis and assistance. CANON FPA 2500 I 3 is the perfect choice for a high precision, high throughput and top-quality wafer stepper solution. Using advanced optics, lithography technology and resist processing, this system provides industry-leading performance and delivers precise imaging and lithography of a wide range of semiconductor devices.
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